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Journal: Sensors, 2024
Volume: 24
Number: 3058
Article:
Enhancing the Responsiveness of Thermoelectric Gas Sensors with Boron-Doped and Thermally Annealed SiGe Thin Films via Low-Pressure Chemical Vapor Deposition
Authors:
by
Woosuck Shin, Maiko Nishibori, Toshio Itoh, Noriya Izu and Ichiro Matsubara
Link:
https://www.mdpi.com/1424-8220/24/10/3058
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