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Journal: Sensors, 2009
Volume: 9
Number: 1141

Article: Piezoresistive Sensitivity, Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures
Authors: by Changzhi Shi, Xiaowei Liu and Rongyan Chuai
Link: https://www.mdpi.com/1424-8220/9/2/1141

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