Falidas, K.E.; Kühnel, K.; Rudolph, M.; Everding, M.B.; Czernohorsky, M.; Heitmann, J.
Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters. Materials 2022, 15, 8325.
https://doi.org/10.3390/ma15238325
AMA Style
Falidas KE, Kühnel K, Rudolph M, Everding MB, Czernohorsky M, Heitmann J.
Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters. Materials. 2022; 15(23):8325.
https://doi.org/10.3390/ma15238325
Chicago/Turabian Style
Falidas, Konstantinos Efstathios, Kati Kühnel, Matthias Rudolph, Maximilian B. Everding, Malte Czernohorsky, and Johannes Heitmann.
2022. "Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters" Materials 15, no. 23: 8325.
https://doi.org/10.3390/ma15238325
APA Style
Falidas, K. E., Kühnel, K., Rudolph, M., Everding, M. B., Czernohorsky, M., & Heitmann, J.
(2022). Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters. Materials, 15(23), 8325.
https://doi.org/10.3390/ma15238325
