Wang, L.; Zhao, Y.; Zhao, Y.; Yang, Y.; Gong, T.; Hao, L.; Ren, W.
Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology. Micromachines 2021, 12, 56.
https://doi.org/10.3390/mi12010056
AMA Style
Wang L, Zhao Y, Zhao Y, Yang Y, Gong T, Hao L, Ren W.
Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology. Micromachines. 2021; 12(1):56.
https://doi.org/10.3390/mi12010056
Chicago/Turabian Style
Wang, Lukang, You Zhao, Yulong Zhao, Yu Yang, Taobo Gong, Le Hao, and Wei Ren.
2021. "Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology" Micromachines 12, no. 1: 56.
https://doi.org/10.3390/mi12010056
APA Style
Wang, L., Zhao, Y., Zhao, Y., Yang, Y., Gong, T., Hao, L., & Ren, W.
(2021). Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology. Micromachines, 12(1), 56.
https://doi.org/10.3390/mi12010056