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Micromachines
Volume 13
Issue 4
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Micromachines, Volume 13, Issue 4 (April 2022) – 151 articles

Cover Story (view full-size image): We developed an intravenous injection method to treat AKI by HDACi-loaded calcium alginate microspheres. The size of the prepared calcium alginate microspheres could be adjusted by the concentration of alginate and the flow rate of the fluid. Appropriately sized, highly cross-linked microspheres were selected as carriers of the drug (HDACi) for injection into the tail vein of mice. The results showed that this method could reduce the renal regional inflammatory response and attenuate renal injury. View this paper.
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34 pages, 4196 KiB  
Review
High Precision 3D Printing for Micro to Nano Scale Biomedical and Electronic Devices
by Kirsty Muldoon, Yanhua Song, Zeeshan Ahmad, Xing Chen and Ming-Wei Chang
Micromachines 2022, 13(4), 642; https://doi.org/10.3390/mi13040642 - 18 Apr 2022
Cited by 46 | Viewed by 9127
Abstract
Three dimensional printing (3DP), or additive manufacturing, is an exponentially growing process in the fabrication of various technologies with applications in sectors such as electronics, biomedical, pharmaceutical and tissue engineering. Micro and nano scale printing is encouraging the innovation of the aforementioned sectors, [...] Read more.
Three dimensional printing (3DP), or additive manufacturing, is an exponentially growing process in the fabrication of various technologies with applications in sectors such as electronics, biomedical, pharmaceutical and tissue engineering. Micro and nano scale printing is encouraging the innovation of the aforementioned sectors, due to the ability to control design, material and chemical properties at a highly precise level, which is advantageous in creating a high surface area to volume ratio and altering the overall products’ mechanical and physical properties. In this review, micro/-nano printing technology, mainly related to lithography, inkjet and electrohydrodynamic (EHD) printing and their biomedical and electronic applications will be discussed. The current limitations to micro/-nano printing methods will be examined, covering the difficulty in achieving controlled structures at the miniscule micro and nano scale required for specific applications. Full article
(This article belongs to the Special Issue 3D Printed Micro-/Nano Devices)
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9 pages, 3118 KiB  
Article
Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film
by Ying Xie, Yan Liu, Jieyu Liu, Lei Wang, Wenjuan Liu, Bo Woon Soon, Yao Cai and Chengliang Sun
Micromachines 2022, 13(4), 641; https://doi.org/10.3390/mi13040641 - 18 Apr 2022
Cited by 5 | Viewed by 2371
Abstract
A resonator with an appropriate electromechanical coupling coefficient (Kt2) is crucial for filter applications in radio communication. In this paper, we present an effective method to tune the Kt2 of resonators by introducing different materials into a [...] Read more.
A resonator with an appropriate electromechanical coupling coefficient (Kt2) is crucial for filter applications in radio communication. In this paper, we present an effective method to tune the Kt2 of resonators by introducing different materials into a lithium niobate (LiNbO3) piezoelectric matrix. The effective piezoelectric coefficients e33eff and e15eff of composite materials with four different introduced materials were calculated. The results show that the e15eff of SiO2/LiNbO3 composite piezoelectric material was mostly sensitive to an increase in the width of introduced SiO2 material. Simultaneously, the simulation of a laterally excited bulk wave resonator (XBAR) with SiO2/LiNbO3 composite material was also carried out to verify the change in the Kt2 originating from the variation in e15eff. The achievable n79 filter using the SiO2/LiNbO3 composite material demonstrates the promising prospects of tuning Kt2 by introducing different materials into a LiNbO3 piezoelectric matrix. Full article
(This article belongs to the Special Issue Recent Advances in RF MEMS)
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15 pages, 3988 KiB  
Article
Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC)
by Wuqing Lin, Zhongwei Hu, Yue Chen, Yuqiang Zhang, Yiqing Yu, Xipeng Xu and Jie Zhang
Micromachines 2022, 13(4), 640; https://doi.org/10.3390/mi13040640 - 18 Apr 2022
Cited by 12 | Viewed by 2892
Abstract
Single-crystal silicon carbide (SiC) is widely used because of its excellent properties. However, SiC is a typical hard and brittle material, and there are many challenges in realizing its high efficiency and high-precision machining. Grinding is the main method used to achieve the [...] Read more.
Single-crystal silicon carbide (SiC) is widely used because of its excellent properties. However, SiC is a typical hard and brittle material, and there are many challenges in realizing its high efficiency and high-precision machining. Grinding is the main method used to achieve the high-efficiency processing of SiC, but the contradiction between processing quality and processing efficiency is prominent. Vibration-assisted grinding is an effective method to realize high-efficiency and precision machining of SiC. To reveal the vibration-assisted grinding mechanism of SiC, the vibration-assisted nano-scratch process is studied using the molecular dynamics method, and the material removal process and damage formation mechanism in the vibration-assisted scratch are analyzed. Aiming at the three main structural crystal types, 3C-, 4H- and 6H-SiC, scratch simulations were carried out. The vibration-assisted scratch characteristics of SiC polytypes were evaluated from the perspectives of scratch force and the amorphous layer. It was found that the effects of vibration-assisted scratch on different crystal structures of SiC differ, and 3C-SiC is quite different from 4H- and 6H-SiC. Through vibration-assisted scratch simulations under different scratch conditions and vibration characteristics, the influence laws for machining parameters and vibration characteristic parameters were explored. It was found that increasing the frequency and amplitude was beneficial for improving the machining effect. This provides a basis for vibration-assisted grinding technology to be used in the high-efficiency precision machining of SiC. Full article
(This article belongs to the Section E：Engineering and Technology)
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14 pages, 5866 KiB  
Article
Influence of ZnO Film Deposition Parameters on Piezoelectric Properties and Film-to-Substrate Adhesion on a GH4169 Superalloy Steel Substrate
by Guowei Mo, Yunxian Cui, Junwei Yin and Pengfei Gao
Micromachines 2022, 13(4), 639; https://doi.org/10.3390/mi13040639 - 18 Apr 2022
Cited by 7 | Viewed by 1876
Abstract
ZnO film is widely used in the field of health monitoring sensors, which has high requirements for the piezoelectric coefficient and film-to-substrate adhesion of the ZnO film. In this study, ZnO thin films were grown on a GH4169 superalloy steel (GSS) substrate using [...] Read more.
ZnO film is widely used in the field of health monitoring sensors, which has high requirements for the piezoelectric coefficient and film-to-substrate adhesion of the ZnO film. In this study, ZnO thin films were grown on a GH4169 superalloy steel (GSS) substrate using magnetron sputtering, and the effects of the sputtering power, argon–oxygen ratio, and sputtering pressure on the piezoelectric coefficient and film-to-substrate adhesion were studied. The composition, microstructure, and crystal orientation of ZnO thin films deposited under different process parameters were analyzed using X-ray diffraction (XRD), a scanning electron microscope (SEM), and an energy spectrum analyzer (EDS). The piezoelectric coefficient d33 was measured using a piezoelectric coefficient measuring instrument. The critical value of adhesion between the film and substrate was measured using the scratch method. The results demonstrated that the ZnO films had the most desirable properties when the sputtering power was 150 W, the argon–oxygen ratio was 25:10, and the sputtering pressure was 0.7 Pa. The XRD results showed that the ZnO film samples had the strongest (002) crystal orientation at 2θ = 34.4°; the SEM photos showed that the film samples were flat and uniform; and the EDS composition analysis results showed that the composition was close to the theoretical value. The maximum d33 coefficient value was 5.12 pC/N, and the maximum value of film-to-substrate adhesion between the ZnO films and GSS substrate was 4220 mN. Full article
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10 pages, 26904 KiB  
Article
Surface Plasmon Resonance of Large-Size Ag Nanobars
by Fan Wu, Lin Cheng and Wenhui Wang
Micromachines 2022, 13(4), 638; https://doi.org/10.3390/mi13040638 - 18 Apr 2022
Cited by 5 | Viewed by 3157
Abstract
Silver nanobars have attracted much attention due to their distinctive localized surface plasmon resonance (LSPR) in the visible and near-infrared regions. In this work, large-size Ag nanobars (length: 400~1360 nm) working at a longer-wavelength near-infrared range (>1000 nm) have been synthesized. By using [...] Read more.
Silver nanobars have attracted much attention due to their distinctive localized surface plasmon resonance (LSPR) in the visible and near-infrared regions. In this work, large-size Ag nanobars (length: 400~1360 nm) working at a longer-wavelength near-infrared range (>1000 nm) have been synthesized. By using the finite-difference time-domain (FDTD) simulation, the LSPR properties of a single large-size Ag nanobar are systematically investigated. The LSPR in Ag nanobar can be flexibly tuned in a wide wavelength range (400~2000 nm) by changing the bar length or etching the bar in the length direction. Our work provides a flexible way to fabricate nanoparticle arrays using large-size nanobars and throws light on the applications of large-size nanomaterials on wide spectral absorbers, LSPR-based sensors and nanofilters. Full article
(This article belongs to the Special Issue Tunable Nanophotonics and Reconfigurable Metadevices)
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24 pages, 10770 KiB  
Article
Large-Eddy Simulation on the Aerodynamic and Thermal Characteristics in a Micropipe of the Hypersonic Engine Precooler
by Junqiang Zhang, Zhengping Zou and Yifan Wang
Micromachines 2022, 13(4), 637; https://doi.org/10.3390/mi13040637 - 17 Apr 2022
Cited by 4 | Viewed by 2307
Abstract
The precooling air-breathing technique has become a study focus in the aerospace field. Research on the internal flow and heat-transfer mechanism of the precooler is important for design and optimization. A large-eddy simulation was used to study the aerodynamic and thermal characteristics in [...] Read more.
The precooling air-breathing technique has become a study focus in the aerospace field. Research on the internal flow and heat-transfer mechanism of the precooler is important for design and optimization. A large-eddy simulation was used to study the aerodynamic and thermal characteristics in a micropipe of the hypersonic engine precooler with supercritical methane as coolant and fuel. Under the effect of buoyancy, the high-temperature and low-density fluid near the wall in the circumferential direction gradually accumulate to the top wall. The accumulation of low-density fluid enhances the thermal acceleration effect at the top wall, which intensifies the local turbulent relaminarization and forms an M-shaped velocity distribution, resulting in the weakening of the heat transfer. On the other hand, the high-density fluid gathers to the bottom wall under the influence of gravity, the local thermal acceleration effect is weakened, and the flow heat transfer is enhanced. The influence of the relationship between the turbulent burst and the turbulent heat transfer under the effect of buoyancy is analyzed. It is found that the low-speed ejection events and high-speed sweep events are strengthened at the bottom wall, especially the low-speed ejection. However, the occurrence of these events at the top wall is restrained to a certain extent. Full article
(This article belongs to the Special Issue Fluid Dynamics and Heat Transport in Microchannels)
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18 pages, 2937 KiB  
Review
Conventional and Microfluidic Methods for the Detection of Nucleic Acid of SARS-CoV-2
by Weidu Song, Taiyi Zhang, Huichao Lin, Yujing Yang, Gaozhen Zhao and Xiaowen Huang
Micromachines 2022, 13(4), 636; https://doi.org/10.3390/mi13040636 - 17 Apr 2022
Cited by 9 | Viewed by 2977
Abstract
Nucleic acid testing (NAT) played a crucial role in containing the spread of SARS-CoV-2 during the epidemic. The gold standard technique, the quantitative real-time polymerase chain reaction (qRT-PCR) technique, is currently used by the government and medical boards to detect SARS-CoV-2. Due to [...] Read more.
Nucleic acid testing (NAT) played a crucial role in containing the spread of SARS-CoV-2 during the epidemic. The gold standard technique, the quantitative real-time polymerase chain reaction (qRT-PCR) technique, is currently used by the government and medical boards to detect SARS-CoV-2. Due to the limitations of this technology, it is not capable of meeting the needs of large-scale rapid detection. To solve this problem, many new techniques for detecting nucleic acids of SARS-CoV-2 have been reported. Therefore, a review that systematically and comprehensively introduces and compares various detection technologies is needed. In this paper, we not only review the traditional NAT but also provide an overview of microfluidic-based NAT technologies and summarize and discuss the characteristics and development prospects of these techniques. Full article
(This article belongs to the Section A：Physics)
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13 pages, 2815 KiB  
Article
A Novel Inchworm-Inspired Soft Robotic Colonoscope Based on a Rubber Bellows
by Jinyan Chen, Jianlin Yang, Feng Qian, Qing Lu, Yu Guo, Zhijun Sun and Chao Chen
Micromachines 2022, 13(4), 635; https://doi.org/10.3390/mi13040635 - 17 Apr 2022
Cited by 12 | Viewed by 3197
Abstract
Colorectal cancer is a serious threat to human health. Colonoscopy is the most effective procedure for the inspection of colorectal cancer. However, traditional colonoscopy may cause pain, which can lead to the patient’s fear of colonoscopy. The use of active-motion colonoscopy robots is [...] Read more.
Colorectal cancer is a serious threat to human health. Colonoscopy is the most effective procedure for the inspection of colorectal cancer. However, traditional colonoscopy may cause pain, which can lead to the patient’s fear of colonoscopy. The use of active-motion colonoscopy robots is expected to replace traditional colonoscopy procedures for colorectal cancer screening, without causing pain to patients. This paper proposes an inchworm-like soft colonoscopy robot based on a rubber spring. The motion mechanism of the robot consists of two anchoring units and an elongation unit. The elongation unit of the robot is driven by 3 cables during contraction and by its inherent elasticity during extension. The balloon is selected as the anchoring mechanism of the robot. It has soft contact with the colon and will not damage the colon wall, which means no discomfort is caused. The elastic force test of the rubber spring shows that the elongation unit of the robot has sufficient restorative force to drive the robot to move forward and backward. The influence of the balloon’s expansion size on the dexterity of the robot head is analyzed, and the functions of the balloons are expounded. The balloon can not only assist the robot in its locomotion but also assist the robot to perform a better inspection. The robot can move successfully in a horizontal, straight, and inclined isolated pig colon, showing great clinical application potential. Full article
(This article belongs to the Special Issue Flexible Sensors and Actuators for Biomedicine)
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11 pages, 4676 KiB  
Article
A Comparative Analysis of Printed Circuit Boards with Surface-Mounted and Embedded Components under Natural and Forced Convection
by Maksim Korobkov, Fedor Vasilyev and Vladimir Mozharov
Micromachines 2022, 13(4), 634; https://doi.org/10.3390/mi13040634 - 17 Apr 2022
Cited by 10 | Viewed by 2523
Abstract
This article is dedicated to the research of the physical reliability of electronic devices. It consists of a comparative thermal analysis of the cooling efficiency of a surface-mounted and an embedded component on a printed circuit board. A simulated finite element model of [...] Read more.
This article is dedicated to the research of the physical reliability of electronic devices. It consists of a comparative thermal analysis of the cooling efficiency of a surface-mounted and an embedded component on a printed circuit board. A simulated finite element model of heat distribution over a printed circuit board with a surface component was constructed. An experiment confirmed the objectivity of the modeling results. The component’s temperature was then analyzed depending on the installation method (surface and embedded) and the cooling method (natural and forced with varying airflow velocities). The results showed that the temperature of the embedded component was less than the temperature of the surface-mounted component under natural convection and, in most cases, under forced convection (with an airflow velocity of forced cooling under 16 ms). Full article
(This article belongs to the Special Issue Lab-on-PCB Devices)
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11 pages, 2960 KiB  
Article
Optical Fiber–Based Continuous Liquid Level Sensor Based on Rayleigh Backscattering
by Xingqiang Chi, Xiangjun Wang and Xuan Ke
Micromachines 2022, 13(4), 633; https://doi.org/10.3390/mi13040633 - 17 Apr 2022
Cited by 5 | Viewed by 3587
Abstract
This work reports an optical fiber–based continuous liquid level sensor for cryogenic propellant mass gauging, which has significant advantages over the existing liquid level sensors in terms of accuracy, simplicity, and reliability. Based on Rayleigh backscattering coherent optical frequency domain reflectometry, every point [...] Read more.
This work reports an optical fiber–based continuous liquid level sensor for cryogenic propellant mass gauging, which has significant advantages over the existing liquid level sensors in terms of accuracy, simplicity, and reliability. Based on Rayleigh backscattering coherent optical frequency domain reflectometry, every point of the sensing fiber is a liquid sensor which is able to distinguish liquid and vapor. We obtained a measurement accuracy of 1 mm for the optical fiber sensor by measuring both liquid nitrogen and water levels. For the first time, for practical applications, we experimentally studied the influence of ambient temperature and strain changes on the sensing performance as well as the repeatability of the optical fiber–based liquid level sensor’s measurements. Full article
(This article belongs to the Special Issue Optical Sensing and Devices)
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14 pages, 7859 KiB  
Article
Design of 4.7 μm High-Efficiency Hybrid Dielectric Reflection Gratings
by Ye Wang, Xiuhua Fu, Yongyi Chen, Yuxin Lei, Li Qin and Lijun Wang
Micromachines 2022, 13(4), 632; https://doi.org/10.3390/mi13040632 - 16 Apr 2022
Cited by 4 | Viewed by 2551
Abstract
Traditional reflective diffraction gratings working at 4.7 μm are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 μm period multilayer grating design using [...] Read more.
Traditional reflective diffraction gratings working at 4.7 μm are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 μm period multilayer grating design using hybrid multilayer dielectrics. With a layer of 0.353 μm Si and a layer of 0.905 μm SiO2 forming the rectangular grating, the maximum of larger than 99.99% and the overall first-order DE reached 97.88%. The usable spectrum width is larger than 0.2 μm, more than four times larger than that of the pure Si rectangular grating. This high DE multilayer grating is an ideal element for high-power laser systems with the spectrum beam combining method. Full article
(This article belongs to the Special Issue Micro and Nano Machining Processes, 2nd Edition)
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12 pages, 3210 KiB  
Article
A Flexible Terahertz Metamaterial Biosensor for Cancer Cell Growth and Migration Detection
by Weihao Fang, Xiaoqing Lv, Zhengtai Ma, Jian Liu, Weihua Pei and Zhaoxin Geng
Micromachines 2022, 13(4), 631; https://doi.org/10.3390/mi13040631 - 16 Apr 2022
Cited by 16 | Viewed by 3668
Abstract
Metamaterial biosensors have been extensively used to identify cell types and detect concentrations of tumor biomarkers. However, the methods for in situ and non-destruction measurement of cell migration, which plays a key role in tumor progression and metastasis, are highly desirable. Therefore, a [...] Read more.
Metamaterial biosensors have been extensively used to identify cell types and detect concentrations of tumor biomarkers. However, the methods for in situ and non-destruction measurement of cell migration, which plays a key role in tumor progression and metastasis, are highly desirable. Therefore, a flexible terahertz metamaterial biosensor based on parylene C substrate was proposed for label-free and non-destructive detection of breast cancer cell growth and migration. The maximum resonance peak frequency shift achieved 183.2 GHz when breast cancer cell MDA−MB−231 was cultured onto the surface of the metamaterial biosensor for 72 h. A designed polydimethylsiloxane (PDMS) barrier sheet was applied to detect the cell growth rate which was quantified as 14.9 µm/h. The experimental peak shift expressed a linear relationship with the covered area and a quadratic relationship with the distance, which was consistent with simulation results. Additionally, the cell migration indicated that the transform growth factor-β (TGF-β) promoted the cancer cell migration. The terahertz metamaterial biosensor shows great potential for the investigation of cell biology in the future. Full article
(This article belongs to the Special Issue State-of-the-Art Optical Biosensors)
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26 pages, 5794 KiB  
Review
Femtosecond Laser-Fabricated Photonic Chips for Optical Communications: A Review
by Chengkun Cai and Jian Wang
Micromachines 2022, 13(4), 630; https://doi.org/10.3390/mi13040630 - 16 Apr 2022
Cited by 15 | Viewed by 4885
Abstract
Integrated optics, having the unique properties of small size, low loss, high integration, and high scalability, is attracting considerable attention and has found many applications in optical communications, fulfilling the requirements for the ever-growing information rate and complexity in modern optical communication systems. [...] Read more.
Integrated optics, having the unique properties of small size, low loss, high integration, and high scalability, is attracting considerable attention and has found many applications in optical communications, fulfilling the requirements for the ever-growing information rate and complexity in modern optical communication systems. Femtosecond laser fabrication is an acknowledged technique for producing integrated photonic devices with unique features, such as three-dimensional fabrication geometry, rapid prototyping, and single-step fabrication. Thus, plenty of femtosecond laser-fabricated on-chip devices have been manufactured to realize various optical communication functions, such as laser generation, laser amplification, laser modulation, frequency conversion, multi-dimensional multiplexing, and photonic wire bonding. In this paper, we review some of the most relevant research progress in femtosecond laser-fabricated photonic chips for optical communications, which may break new ground in this area. First, the basic principle of femtosecond laser fabrication and different types of laser-inscribed waveguides are briefly introduced. The devices are organized into two categories: active devices and passive devices. In the former category, waveguide lasers, amplifiers, electric-optic modulators, and frequency converters are reviewed, while in the latter, polarization multiplexers, mode multiplexers, and fan-in/fan-out devices are discussed. Later, photonic wire bonding is also introduced. Finally, conclusions and prospects in this field are also discussed. Full article
(This article belongs to the Special Issue Photonic Chips for Optical Communications)
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34 pages, 7572 KiB  
Review
Advances in Soft and Dry Electrodes for Wearable Health Monitoring Devices
by Hyeonseok Kim, Eugene Kim, Chanyeong Choi and Woon-Hong Yeo
Micromachines 2022, 13(4), 629; https://doi.org/10.3390/mi13040629 - 16 Apr 2022
Cited by 49 | Viewed by 8047
Abstract
Electrophysiology signals are crucial health status indicators as they are related to all human activities. Current demands for mobile healthcare have driven considerable interest in developing skin-mounted electrodes for health monitoring. Silver-Silver chloride-based (Ag-/AgCl) wet electrodes, commonly used in conventional clinical practice, provide [...] Read more.
Electrophysiology signals are crucial health status indicators as they are related to all human activities. Current demands for mobile healthcare have driven considerable interest in developing skin-mounted electrodes for health monitoring. Silver-Silver chloride-based (Ag-/AgCl) wet electrodes, commonly used in conventional clinical practice, provide excellent signal quality, but cannot monitor long-term signals due to gel evaporation and skin irritation. Therefore, the focus has shifted to developing dry electrodes that can operate without gels and extra adhesives. Compared to conventional wet electrodes, dry ones offer various advantages in terms of ease of use, long-term stability, and biocompatibility. This review outlines a systematic summary of the latest research on high-performance soft and dry electrodes. In addition, we summarize recent developments in soft materials, biocompatible materials, manufacturing methods, strategies to promote physical adhesion, methods for higher breathability, and their applications in wearable biomedical devices. Finally, we discuss the developmental challenges and advantages of various dry electrodes, while suggesting research directions for future studies. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Engineering and Technology 2021)
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12 pages, 3494 KiB  
Article
A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator
by Wenyao Liu, Wei Li, Chenxi Liu, Enbo Xing, Yanru Zhou, Lai Liu and Jun Tang
Micromachines 2022, 13(4), 628; https://doi.org/10.3390/mi13040628 - 16 Apr 2022
Viewed by 2076
Abstract
This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO2 substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed [...] Read more.
This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO2 substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the x-axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO2 substrate and the Fe–Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors. Full article
(This article belongs to the Special Issue MEMS Inertial Sensors)
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10 pages, 4450 KiB  
Article
Design of a Biologically Inspired Water-Walking Robot Powered by Artificial Muscle
by Dongjin Kim, Minseok Gwon, Baekgyeom Kim, Victor M. Ortega-Jimenez, Seungyong Han, Daeshik Kang, M. Saad Bhamla and Je-Sung Koh
Micromachines 2022, 13(4), 627; https://doi.org/10.3390/mi13040627 - 15 Apr 2022
Cited by 7 | Viewed by 3619
Abstract
The agile and power-efficient locomotion of a water strider has inspired many water-walking devices. These bioinspired water strider robots generally adopt a DC motor to create a sculling trajectory of the driving leg. These robots are, thus, inevitably heavy with many supporting legs [...] Read more.
The agile and power-efficient locomotion of a water strider has inspired many water-walking devices. These bioinspired water strider robots generally adopt a DC motor to create a sculling trajectory of the driving leg. These robots are, thus, inevitably heavy with many supporting legs decreasing the velocity of the robots. There have only been a few attempts to employ smart materials despite their advantages of being lightweight and having high power densities. This paper proposes an artificial muscle-based water-walking robot capable of moving forward and turning with four degrees of freedom. A compliant amplified shape memory alloy actuator (CASA) used to amplify the strain of a shape memory alloy wire enables a wide sculling motion of the actuation leg with only four supporting legs to support the entire weight of the robot. Design parameters to increase the actuation strain of the actuator and to achieve a desired swing angle (80°) are analyzed. Finally, experiments to measure the forward speed and angular velocities of the robot are carried out to compare with other robots. The robot weighs only 0.236 g and has a maximum and average speed of 1.56, 0.31 body length per second and a maximum and average angular velocity of 145.05°/s and 14.72°/s. Full article
(This article belongs to the Special Issue Microrobotics: A Commemorative Issue in Honor of Professor Robert J. Wood)
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13 pages, 5249 KiB  
Article
Dimension Reduction Localization Algorithm of Mixed Sources Based on MEMS Vector Hydrophone Array
by Zhenzhen Shang, Libo Yang, Wendong Zhang, Guojun Zhang, Xiaoyong Zhang and Hairong Kou
Micromachines 2022, 13(4), 626; https://doi.org/10.3390/mi13040626 - 15 Apr 2022
Cited by 1 | Viewed by 1976
Abstract
In this paper, a mixed sources dimension reduction Multiple Signal Classification (MUSIC) localization algorithm suitable for Micro-Electro-Mechanical System (MEMS) vector hydrophone linear arrays is proposed, which reduces the two-dimensional search to one-dimensional local search. Firstly, the Lagrangian function is constructed by quadratic optimization [...] Read more.
In this paper, a mixed sources dimension reduction Multiple Signal Classification (MUSIC) localization algorithm suitable for Micro-Electro-Mechanical System (MEMS) vector hydrophone linear arrays is proposed, which reduces the two-dimensional search to one-dimensional local search. Firstly, the Lagrangian function is constructed by quadratic optimization idea to obtain the estimates of azimuth angles. Secondly, the least square method is utilized for optimal match to obtain the direction-of-arrivals (DOAs) and ranges, and the range parameters are judged in Fresnel zone to obtain the azimuth information of all near-field sources. Finally, find the common DOAs and achieve high-resolution separation of far-field and near-field sources. Simulation and field experiments prove that the proposed algorithm only needs a small number of elements can solve the problem of port and starboard ambiguity, does not need to construct high-order cumulants or multi-dimensional search while the parameters are automatically matched with low computational complexity. This study provides an idea of the engineering application of vector hydrophone. Full article
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13 pages, 16821 KiB  
Article
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
by Chris Stoeckel, Katja Meinel, Marcel Melzer, Agnė Žukauskaitė, Sven Zimmermann, Roman Forke, Karla Hiller and Harald Kuhn
Micromachines 2022, 13(4), 625; https://doi.org/10.3390/mi13040625 - 15 Apr 2022
Cited by 6 | Viewed by 2801
Abstract
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm2 (Design 1) and 4 × 6 mm2 (Design 2) footprint [...] Read more.
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm2 (Design 1) and 4 × 6 mm2 (Design 2) footprint with 600 nm AlN or 2000 nm Al0.68Sc0.32N as piezoelectric transducer material are investigated. The chip with Design 1 and Al0.68Sc0.32N has a resonance frequency of 1.8 kHz and a static scan angle of 38.4° at 400 V DC was measured. Design 2 has its resonance at 2.1 kHz. The maximum static scan angle is 55.6° at 220 V DC, which is the maximum deflection measurable with the experimental setup. The static deflection per electric field is increased by a factor of 10, due to the optimization of the design and the research and development of high-performance piezoelectric transducer materials with large piezoelectric coefficient and high electrical breakthrough voltage. Full article
(This article belongs to the Special Issue Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices)
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12 pages, 3180 KiB  
Article
Study of Through-Hole Micro-Drilling in Sapphire by Means of Pulsed Bessel Beams
by Akhil Kuriakose, Monica Bollani, Paolo Di Trapani and Ottavia Jedrkiewicz
Micromachines 2022, 13(4), 624; https://doi.org/10.3390/mi13040624 - 15 Apr 2022
Cited by 10 | Viewed by 2627
Abstract
Ultrashort Bessel beams have been used in this work to study the response of a 430-μm-thick monocrystalline sapphire sample to laser–matter interaction when injecting the beam orthogonally through the whole sample thickness. We show that with a 12° Bessel beam cone angle, we [...] Read more.
Ultrashort Bessel beams have been used in this work to study the response of a 430-μm-thick monocrystalline sapphire sample to laser–matter interaction when injecting the beam orthogonally through the whole sample thickness. We show that with a 12° Bessel beam cone angle, we are able to internally modify the material and generate tailorable elongated microstructures while preventing the formation of surface cracks, even in the picosecond regime, contrary to what was previously reported in the literature. On the other hand, by means of Bessel beam machining combined with a trepanning technique where very high energy pulses are needed, we were able to generate 100 μm diameter through-holes, eventually with negligible cracks and very low taper angles thanks to an optimization achieved by using a 60-μm-thick layer of Kapton Polyimide removable tape. Full article
(This article belongs to the Special Issue Advanced (Citius, Minor, Simplicius) Laser Fabrication Technologies for Cross-Field Applications)
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16 pages, 7166 KiB  
Article
Energy Harvester Based on an Eccentric Pendulum and Wiegand Wires
by Yi-Hsin Chen, Chien Lee, Yu-Jen Wang, You-Yu Chang and Yi-Cheng Chen
Micromachines 2022, 13(4), 623; https://doi.org/10.3390/mi13040623 - 15 Apr 2022
Cited by 8 | Viewed by 2601
Abstract
This study proposed an energy harvester that combines an eccentric pendulum with Wiegand wires to harvest the kinetic energy of a rotating plate. The energy harvester converts the kinetic energy into electrical energy to power sensors mounted on the rotating plate or wheel. [...] Read more.
This study proposed an energy harvester that combines an eccentric pendulum with Wiegand wires to harvest the kinetic energy of a rotating plate. The energy harvester converts the kinetic energy into electrical energy to power sensors mounted on the rotating plate or wheel. The kinetic model is derived from the Euler–Lagrange equation. The eccentric pendulum generates a swing motion from the direction variation of the centrifugal force and the gravitational force. The magnetic circuit is designed such that, during the swing motion, an alternating magnetic field is formed to induce the output voltage of the Wiegand wire. COMSOL software was used to simulate magnetic flux density and optimize the geometric parameters of magnets. Response surface methodology was used to formulate the output voltage model. Magnetic flux density affects output voltage dramatically. However, the output voltage is not sensitive to the gradient of magnetic flux density. The experimental results indicate that when the Wiegand wire is 14.2 mm from the magnet, the generation power is 0.118–1.15 mW, in a speed range of 240–540 rpm. When the Wiegand wire is 7.0 mm from the magnet, the generation power is 0.741–1.06 mW, in a speed range of 480–660 rpm. Full article
(This article belongs to the Special Issue Micro-Scale Energy Harvesting Devices)
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9 pages, 2326 KiB  
Article
Thermal Management of Serpentine Flexible Heater Based on the Orthotropic Heat Conduction Model
by Zhao Zhao, Jin Nan and Min Li
Micromachines 2022, 13(4), 622; https://doi.org/10.3390/mi13040622 - 15 Apr 2022
Cited by 5 | Viewed by 1973
Abstract
Flexible heaters can perfectly fit with undevelopable surfaces for heating in many practical applications such as thermotherapy, defogging/deicing systems and warming garments. Considering the requirement for stretchability in a flexible heater, certain spacing needs to be retained between serpentine heat sources for deformation [...] Read more.
Flexible heaters can perfectly fit with undevelopable surfaces for heating in many practical applications such as thermotherapy, defogging/deicing systems and warming garments. Considering the requirement for stretchability in a flexible heater, certain spacing needs to be retained between serpentine heat sources for deformation which will inevitably bring critical challenges to the thermal uniformity. In order to reconcile these two conflicting aspects, a novel method is proposed by embedding the serpentine heat source in orthotropic layers to achieve comprehensive performance in stretchability and uniform heating. Such a scheme takes advantage of the ability of orthotropic material to control the heat flow distribution via orthotropic thermal conductivity. In this paper, an analytical heat conduction model with orthotropic substrate and encapsulation is calculated using Fourier cosine transform, which is validated by finite element analysis (FEA). Meanwhile, the effects of the orthotropic substrate or encapsulation with different ratios of thermal conductivity and the geometric spacing on the thermal properties are investigated, which can help guide the design and fabrication of flexible heaters to achieve the goal of uniform heating. Full article
(This article belongs to the Special Issue Structural Analyses and Designs for Flexible/Stretchable Electronics)
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10 pages, 4891 KiB  
Article
Wireless Passive Microwave Antenna-Integrated Temperature Sensor Based on CSRR
by Hairong Kou, Libo Yang, Xiaoyong Zhang, Zhenzhen Shang, Junbing Shi and Xiaoli Wang
Micromachines 2022, 13(4), 621; https://doi.org/10.3390/mi13040621 - 15 Apr 2022
Cited by 8 | Viewed by 2547
Abstract
A novel, wireless, passive substrate-integrated waveguide (SIW) temperature sensor based on a complementary split-ring resonator (CSRR) is presented for ultra-high-temperature applications. The temperature sensor model was established by using the software of HFSS (ANSYS, Canonsburg, PA, USA) to optimize the performance. This sensor [...] Read more.
A novel, wireless, passive substrate-integrated waveguide (SIW) temperature sensor based on a complementary split-ring resonator (CSRR) is presented for ultra-high-temperature applications. The temperature sensor model was established by using the software of HFSS (ANSYS, Canonsburg, PA, USA) to optimize the performance. This sensor can monitor temperature wirelessly using the microwave backscatter principle, which uses a robust high-temperature co-fired ceramic (HTCC) as the substrate for harsh environments. The results are experimentally verified by measuring the S (1,1) parameter of the interrogator antenna without contact. The resonant frequency of the sensor decreases with the increasing temperature using the dielectric perturbation method, which changes from 2.5808 to 2.35941 GHz as the temperature increases from 25 to 1200 °C. The sensitivity of the sensor is 126.74 kHz/°C in the range of 25–400 °C and 217.33 kHz/°C in the range of 400–1200 °C. The sensor described in this study has the advantages of simple structure, higher quality and sensitivity, and lower environmental interference, and has the potential for utilization in multi-site temperature testing or multi-parameter testing (temperature, pressure, gas) in high-temperature environments. Full article
(This article belongs to the Section E：Engineering and Technology)
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22 pages, 15732 KiB  
Article
Refined Simulation Method for Computer-Aided Process Planning Based on Digital Twin Technology
by Yupeng Xin, Yiwen Chen, Wenhui Li, Xiuhong Li and Fengfeng Wu
Micromachines 2022, 13(4), 620; https://doi.org/10.3390/mi13040620 - 15 Apr 2022
Cited by 12 | Viewed by 3084
Abstract
Simulation technology is widely used in computer-aided process planning (CAPP). The part machining process is simulated in the virtual world, which can predict manufacturing errors and optimize the process plan. Simulation accuracy is the guarantee of process decision-making and optimization. This article focuses [...] Read more.
Simulation technology is widely used in computer-aided process planning (CAPP). The part machining process is simulated in the virtual world, which can predict manufacturing errors and optimize the process plan. Simulation accuracy is the guarantee of process decision-making and optimization. This article focuses on the use of digital twin technology to build a high-fidelity process model, taking the advantage of the integration of multiple systems, in order to achieve the dynamic association of real-time manufacturing data and process models. Making use of the CAPP/MES systems, the surface inspection data of the part is fed back to the CAPP system and associated with the digital twin process model. The wavelet transform method is used to reduce the noise of the high-frequency signal of the detection data, and the signal-to-noise ratio (SNR) is calculated to verify the noise reduction effect. The surface topography, after noise reduction, was reconstructed in Matlab. On this basis, the Poisson reconstruction algorithm is used to reconstruct the high-fidelity process model for the refined simulation of the subsequent processes. Finally, by comparing the two sets of simulation experiments with the real machining results, we found that the simulation results, based on the digital twin model, are more accurate than the traditional simulation method by 58%. Full article
(This article belongs to the Section E：Engineering and Technology)
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12 pages, 6432 KiB  
Article
Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect
by Jiachen Li, Jun Liu, Chunrong Peng, Xiangming Liu, Zhengwei Wu and Fengjie Zheng
Micromachines 2022, 13(4), 619; https://doi.org/10.3390/mi13040619 - 15 Apr 2022
Cited by 16 | Viewed by 2458
Abstract
The paper presents a novel non-contact microelectromechanical systems (MEMS) voltage sensor based on the piezoresistive effect of single-crystal silicon. The novelty of the proposed sensor design lies in the implementation of unique single-crystal silicon piezoresistive beams for voltage measurement. The sensitive structure of [...] Read more.
The paper presents a novel non-contact microelectromechanical systems (MEMS) voltage sensor based on the piezoresistive effect of single-crystal silicon. The novelty of the proposed sensor design lies in the implementation of unique single-crystal silicon piezoresistive beams for voltage measurement. The sensitive structure of the sensor produces electrostatic force deformation due to the measured voltage, resulting in the resistance change of single-crystal silicon piezoresistive beams which support a vibrating diaphragm. The voltage can be measured by sensing the resistance change. Moreover, the sensor does not need an additional driving signal and has lower power consumption. The prototype of the sensor was fabricated using an SOI micromachining process. The piezoresistive characteristics of the sensor and the corresponding output response relationship were analyzed through theoretical analysis and finite element simulation. The voltage response characteristics of the sensor were achieved at power frequencies from 50 Hz to 1000 Hz in the paper. The experimental results showed that they were in good agreement with simulations results with the theoretical model and obtained good response characteristics. The sensor has demonstrated that the minimum detectable voltages were 1 V for AC voltages at frequencies from 50 Hz to 300 Hz and 0.5 V for AC voltages at frequencies from 400 Hz to 1000 Hz, respectively. Moreover, the linearities of the sensor were 3.4% and 0.93% in the voltage measurement range of 900–1200 V at the power frequency of 50 Hz and in the voltage measurement range of 400–1200 V at the frequency of 200 Hz, respectively. Full article
(This article belongs to the Section A：Physics)
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15 pages, 3100 KiB  
Article
Comparison of Metrics for Shape Quality Evaluation of Textures Produced by Laser Structuring by Remelting (Waveshape)
by Oleg Oreshkin, Alexander Platonov, Daniil Panov and Victor Petrovskiy
Micromachines 2022, 13(4), 618; https://doi.org/10.3390/mi13040618 - 14 Apr 2022
Cited by 2 | Viewed by 1840
Abstract
The study is focused on investigating approaches for assessing the texture shape deviation obtained by laser structuring by remelting (Waveshape). A number of metrics such as Fourier spectrum harmonic ratio, cross-correlation coefficient (reverse value), and spectral entropy are investigated in terms of surface-texture [...] Read more.
The study is focused on investigating approaches for assessing the texture shape deviation obtained by laser structuring by remelting (Waveshape). A number of metrics such as Fourier spectrum harmonic ratio, cross-correlation coefficient (reverse value), and spectral entropy are investigated in terms of surface-texture shape deviation estimation. The metrics are compared with each other by testing two hypotheses: determination of target-like shape of texture (closest to harmonic shape) and determination of texture presence on the cross-section. Spectral entropy has the best statistical indicators for both hypotheses (Matthews correlation coefficient is equal to 0.70 and 0.77, respectively). The reverse cross-correlation coefficient proved to be close in terms of statistical indicators (Matthews correlation coefficient is equal to 0.58 and 0.75 for the first and second hypothesis), but is able to estimate the shape similarity of regular texture independent on its type. The provided metrics of shape assessment are not limited to the texturing process, so the presented results can be used in a broad range of scientific fields. Full article
(This article belongs to the Special Issue Machine Learning in Micro Fabrication)
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11 pages, 2444 KiB  
Article
Analysis of Nitrogen-Doping Effect on Sub-Gap Density of States in a-IGZO TFTs by TCAD Simulation
by Zheng Zhu, Wei Cao, Xiaoming Huang, Zheng Shi, Dong Zhou and Weizong Xu
Micromachines 2022, 13(4), 617; https://doi.org/10.3390/mi13040617 - 14 Apr 2022
Cited by 9 | Viewed by 5368
Abstract
In this work, the impact of nitrogen doping (N-doping) on the distribution of sub-gap states in amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) is qualitatively analyzed by technology computer-aided design (TCAD) simulation. According to the experimental characteristics, the numerical simulation results reveal that the [...] Read more.
In this work, the impact of nitrogen doping (N-doping) on the distribution of sub-gap states in amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) is qualitatively analyzed by technology computer-aided design (TCAD) simulation. According to the experimental characteristics, the numerical simulation results reveal that the interface trap states, bulk tail states, and deep-level sub-gap defect states originating from oxygen-vacancy- (Vo) related defects can be suppressed by an appropriate amount of N dopant. Correspondingly, the electrical properties and reliability of the a-IGZO TFTs are dramatically enhanced. In contrast, it is observed that the interfacial and deep-level sub-gap defects are increased when the a-IGZO TFT is doped with excess nitrogen, which results in the degeneration of the device’s performance and reliability. Moreover, it is found that tail-distributed acceptor-like N-related defects have been induced by excess N-doping, which is supported by the additional subthreshold slope degradation in the a-IGZO TFT. Full article
(This article belongs to the Special Issue Recent Advances in Thin Film Electronic Devices)
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30 pages, 11287 KiB  
Article
Path Planning Algorithm for Multi-Locomotion Robot Based on Multi-Objective Genetic Algorithm with Elitist Strategy
by Chong Liu, Aizun Liu, Ruchao Wang, Haibin Zhao and Zhiguo Lu
Micromachines 2022, 13(4), 616; https://doi.org/10.3390/mi13040616 - 14 Apr 2022
Cited by 18 | Viewed by 2645
Abstract
The multi-locomotion robot (MLR), including bionic insect microrobot, bionic animal robot and so on, should choose different locomotion modes according to the obstacles it faces. However, under different locomotion modes, the power consumption, moving speed, and falling risk of MLR are different, and [...] Read more.
The multi-locomotion robot (MLR), including bionic insect microrobot, bionic animal robot and so on, should choose different locomotion modes according to the obstacles it faces. However, under different locomotion modes, the power consumption, moving speed, and falling risk of MLR are different, and in most cases, they are mutually exclusive. This paper proposes a path planning algorithm for MLR based on a multi-objective genetic algorithm with elitist strategy (MLRMOEGA), which has four optimization objectives: power consumption, time consumption, path falling risk, and path smoothness. We propose two operators: a map analysis operator and a population diversity expansion operator, to improve the global search ability of the algorithm and solve the problem so that it is easy to fall into the local optimal solution. We conduct simulations on MATLAB, and the results show that the proposed algorithm can effectively optimize the objective function value compared with the traditional genetic algorithm under the equal weight of the four optimization objectives, and, under alternative weights, the proposed algorithm can effectively generate the corresponding path of the decision maker’s intention under the weight of preference. Compared with the traditional genetic algorithm, the global search ability is improved effectively. Full article
(This article belongs to the Special Issue New Advances in Biomimetic Robots)
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14 pages, 2633 KiB  
Article
The Effect of Ink Supply Pressure on Piezoelectric Inkjet
by San Kim, Jun Hyeok Choi, Dong Kee Sohn and Han Seo Ko
Micromachines 2022, 13(4), 615; https://doi.org/10.3390/mi13040615 - 14 Apr 2022
Cited by 13 | Viewed by 3825
Abstract
Experimental and numerical analysis of the drop-on-demand inkjet was conducted to determine the jetting characteristics and meniscus motion under the control of the ink supply pressure. A single transparent nozzle inkjet head driven by a piezoelectric actuator was used to eject droplets. To [...] Read more.
Experimental and numerical analysis of the drop-on-demand inkjet was conducted to determine the jetting characteristics and meniscus motion under the control of the ink supply pressure. A single transparent nozzle inkjet head driven by a piezoelectric actuator was used to eject droplets. To control ink supply pressure, the pressure of the air in the reservoir was regulated by a dual valve pressure controller. The inkjet performance and the motion of the meniscus were evaluated by visualization and numerical simulation. A two-dimensional axisymmetric numerical simulation with the dynamic mesh method was performed to simulate the inkjet dynamics, including the actual deformation of the piezoelectric actuator. Numerical simulation showed good agreement with the experimental results of droplet velocity and volume with an accuracy of 87.1%. Both the experimental and simulation results showed that the drop volume and velocity were linearly proportional to the voltage change. For the specific voltages, an analysis of the effect of the ink supply pressure control was conducted. At the maximum negative pressure, −3 kPa, the average velocity reductions were 0.558 and 0.392 m/s in the experiment and simulation, respectively, which were 18.7 and 11.6% less than those of the uncontrolled case of 0 kPa. Therefore, the simulation environment capable of simulating the entire inkjet dynamics, including meniscus movement regarded to be successfully established. The average volume reductions were 18.7 and 6.97 pL for the experiment and simulation, respectively, which were 21.7 and 9.17% less than those of the uncontrolled case. In the results of the meniscus motion simulation, the damping of the residual vibration agreed well with the experimental results according to the ink supply pressure change. Reducing the ink supply pressure reduced the speed and volume, improved the damping of residual vibrations, and suppressed satellite drops. Decreasing ink supply pressure can be expected to improve the stability and productivity of inkjet printing. Full article
(This article belongs to the Special Issue Recent Advances in Inkjet Technology)
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30 pages, 1640 KiB  
Review
Spectral Interferometry with Frequency Combs
by Krishna Twayana, Israel Rebolledo-Salgado, Ekaterina Deriushkina, Jochen Schröder, Magnus Karlsson and Victor Torres-Company
Micromachines 2022, 13(4), 614; https://doi.org/10.3390/mi13040614 - 14 Apr 2022
Cited by 7 | Viewed by 4726
Abstract
In this review paper, we provide an overview of the state of the art in linear interferometric techniques using laser frequency comb sources. Diverse techniques including Fourier transform spectroscopy, linear spectral interferometry and swept-wavelength interferometry are covered in detail. The unique features brought [...] Read more.
In this review paper, we provide an overview of the state of the art in linear interferometric techniques using laser frequency comb sources. Diverse techniques including Fourier transform spectroscopy, linear spectral interferometry and swept-wavelength interferometry are covered in detail. The unique features brought by laser frequency comb sources are shown, and specific applications highlighted in molecular spectroscopy, optical coherence tomography and the characterization of photonic integrated devices and components. Finally, the possibilities enabled by advances in chip scale swept sources and frequency combs are discussed. Full article
(This article belongs to the Special Issue Photonic Chips for Optical Communications)
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13 pages, 7604 KiB  
Article
Fast and Accurate Prediction of Light Scattering from Plasmonic Nanoarrays in Multiple Directions
by Ting Wan, Tianhao Chen, Yang Bao and Shiyi Wang
Micromachines 2022, 13(4), 613; https://doi.org/10.3390/mi13040613 - 14 Apr 2022
Cited by 2 | Viewed by 1836
Abstract
The method of moments (MoM) is an efficient electromagnetic numerical method for the accurate prediction of light scattering from plasmonic nanostructures. In practice, the light-scattering properties in different incident directions are often concerning. However, traditional MoM generally resorts to the iterative method, which [...] Read more.
The method of moments (MoM) is an efficient electromagnetic numerical method for the accurate prediction of light scattering from plasmonic nanostructures. In practice, the light-scattering properties in different incident directions are often concerning. However, traditional MoM generally resorts to the iterative method, which suffers from the problems of convergence rate and redundant computations for multiple incident excitations. Nanoarray structures will further aggravate these problems due to a large number of unknowns. In this article, an efficient numerical method based on MoM and a hierarchical matrix (H-matrix) algorithm is proposed to solve these problems. Numerical experiments demonstrate the efficiency and accuracy of the proposed method for the prediction of light scattering from plasmonic nanoarrays in multiple directions. Full article
(This article belongs to the Special Issue Physics in Micro/Nano Devices: From Fundamental to Application)
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