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Journal: Micromachines, 2023
Volume: 14
Number: 1870

Article: Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers
Authors: by Hongyu Tan, Debin Pan, Chensheng Wang and Yuan Yao
Link: https://www.mdpi.com/2072-666X/14/10/1870

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