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Journal: Micromachines, 2023
Volume: 14
Number: 1598
1598
Article: High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones
Authors: by Shuzheng Shi, Liyong Ma, Kai Kang, Jie Zhu, Jinjiang Hu, Hong Ma, Yongjun Pang and Zhanying Wang
Link: https://www.mdpi.com/2072-666X/14/8/1598

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