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Journal: Micromachines, 2018
Volume: 9
Number: 673

Article: Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices
Authors: by Anand Tatikonda, Ville P. Jokinen, Hanno Evard and Sami Franssila
Link: https://www.mdpi.com/2072-666X/9/12/673

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