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Journal: Micromachines, 2018
Volume: 9
Number: 673
Article:
Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices
Authors:
by
Anand Tatikonda, Ville P. Jokinen, Hanno Evard and Sami Franssila
Link:
https://www.mdpi.com/2072-666X/9/12/673
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