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Journal: Micromachines, 2018
Volume: 9
Number: 128
Article:
Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness
Authors:
by
Xianshan Dong, Shaohua Yang, Junhua Zhu, Yunfei En and Qinwen Huang
Link:
https://www.mdpi.com/2072-666X/9/3/128
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