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Article
Peer-Review Record

Macroparticle Reduction and Its Transport Mechanism through a Magnetic Filter during Cathodic Vacuum Arc Deposition with an HEA Target

Coatings 2022, 12(10), 1437; https://doi.org/10.3390/coatings12101437
by Pei-En Lee 1, Yu-Kuan Tu 1, Ming-Hung Tsai 2,3, Che-Wei Tsai 1,2,* and Jien-Wei Yeh 1,2,*
Reviewer 1: Anonymous
Reviewer 2:
Coatings 2022, 12(10), 1437; https://doi.org/10.3390/coatings12101437
Submission received: 2 September 2022 / Revised: 28 September 2022 / Accepted: 28 September 2022 / Published: 29 September 2022
(This article belongs to the Special Issue High Entropy Alloy Films)

Round 1

Reviewer 1 Report

Comments are in the attached file.

Comments for author File: Comments.pdf

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Reviewer 2 Report

The study has not been done properly. Just taking one Al foil and making the comments is not proper. That, too, the results are overestimated. You need to do a detailed study to conclude. Kindly take several diameters and shapes of foil to provide the best option to reduce the macroparticles as much as possible. Otherwise, one more article will come after changing the foil size.

Author Response

Point 1: The study has not been done properly. Just taking one Al foil and making the comments is not proper. That, too, the results are overestimated. You need to do a detailed study to conclude. Kindly take several diameters and shapes of foil to provide the best option to reduce the macroparticles as much as possible. Otherwise, one more article will come after changing the foil size.

 

Response 1:

Many thanks for reviewer’s comments and suggestions. In the preliminary experience, we had used a full area aluminum foil in the cross-section of the magnetic filter duct to identify the position where the plasma concentrated. As it is shown in the below figure, the hole was formed because of the denser bombardment of ions and the ion concentration performed a radial distribution. Furthermore, we thought that the MP distribution would be similar to the ion distribution, and our results of the manscript also been proofed and identified in Figure 8. Thus, the position and shape of the Al foil filter was designed by the result above. The center of the hole is 3 cm away from the center of the duct, then we used this 3 cm offset position as the center of our Al foil filter and the daimeter was half of that of the duct, which was the most severe part of ion bombardment.

 

Author Response File: Author Response.pdf

Round 2

Reviewer 2 Report

What is Heretofore in the introduction 

How can the MPs densities be reduced further. Is this the limit or som emore innovation is required?




Author Response

Please see the attachment.

Author Response File: Author Response.pdf

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