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Micromachines
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Novel Devices, Emerging Applications and Advances in MEMS Fabrication Processes,...
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Novel Devices, Emerging Applications and Advances in MEMS Fabrication Processes, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".

Deadline for manuscript submissions: 20 December 2024 | Viewed by 4783

Special Issue Editors

Dr. Margarita Tecpoyotl-Torres

E-Mail Website
Guest Editor
Centro de Investigación en Ingeniería y Ciencias Aplicadas, de la Universidad Autónoma del Estado de Morelos, Avenida Universidad 1001, Chamilpa, Cuernavaca 62209, México
Interests: microelectromechanical systems; microactuators; compliance mechanisms; antenna design; innovation management; development of educational programs
Special Issues, Collections and Topics in MDPI journals
Dr. Jesus J. Alcantar Peña

E-Mail Website1 Website2
Guest Editor
Centro de Ingeniería y Desarrollo Industrial (CIDESI). Av. Playa pie de la cuesta 702, Desarrollo San Pablo, Querétaro 76125, Mexico,
Interests: design of products implementing emerging sensors in medical applications; CMUT; microneedling; pressure sensors; gas sensors; flow sensors; bio-sensors; commercialization of technology
Special Issues, Collections and Topics in MDPI journals
Dr. Agustin L. Herrera-May

E-Mail Website
Guest Editor
Micro and Nanotechnology Research Center, Universidad Veracruzana, Boca del Río 94294, Mexico
Interests: microelectromechanical systems (MEMS); nanoelectromechanical systems (NEMS); microfluidics; mechanical design; microgripper; energy harvesting; magnetic field sensors; resonators; finite element method; mirrors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

MEMS devices have endless advantages over macrodevices and traditional electromechanical devices, with sizes ranging from micrometers to millimeters. MEMS devices are generally produced by implementing micromachining techniques inherited from the integrated circuit industry of silicon technology. From the inception of microelectromechanical systems (MEMS), multiple devices have been developed. Some have passed the development stage and reached commercialization; the first MEMS devices were commercialized in early 1980, when MEMS pressure sensors and accelerometers were widely applied in the automotive industry, and in 1995, the possibility of miniaturization of chemical analysis was introduced. MEMS devices and applications have achieved significant advances in multiple areas that have a positive impact on the technology’s application, as well as in the manufacturing processes that make them a reality. Accordingly, this Special Issue seeks to showcase research papers, communications, and review articles that focus on the following area: (1) designs and modeling of novel MEMS devices; (2) new developments and emergent applications for MEMS devices; and (3) advances in MEMS fabrication processes.

Dr. Margarita Tecpoyotl-Torres
Dr. Jesus J. Alcantar Peña
Dr. Agustin L. Herrera-May
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS sensors
  • MEMS actuators
  • BioMEMS
  • medical MEMS
  • microfluidic devices
  • PiezoMEMS
  • energy harvesters
  • triboelectric nanogenerators
  • MEMS-based electronic systems
  • MEMS fabrication processes
  • MEMS emergent aplications

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Published Papers (2 papers)

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Research

13 pages, 2712 KiB  
Communication
Design of Acetaldehyde Gas Sensor Based on Piezoelectric Multilayer Microelectromechanical System Resonator
by Primavera Argüelles-Lucho, Rosa M. Woo-García, Leandro García-González, Rene Pérez-Cuapio, Natiely Hernández-Sebastian, Agustín L. Herrera-May and Francisco López-Huerta
Micromachines 2024, 15(8), 962; https://doi.org/10.3390/mi15080962 - 28 Jul 2024
Viewed by 2442
Abstract
Acetaldehyde is a volatile organic compound that can cause damage at the cellular and genomic levels. The monitoring of acetaldehyde gas at low concentrations requires fast-response and low-cost sensors. Herein, we propose the design of an acetaldehyde gas sensor based on a low-cost [...] Read more.
Acetaldehyde is a volatile organic compound that can cause damage at the cellular and genomic levels. The monitoring of acetaldehyde gas at low concentrations requires fast-response and low-cost sensors. Herein, we propose the design of an acetaldehyde gas sensor based on a low-cost Microelectromechanical System (MEMS) process. This sensor is formed by a single-clamped piezoelectric multilayer resonator (3000 × 1000 × 52.2 µm) with a simple operating principle and easy signal processing. This resonator uses a zinc oxide piezoelectric layer (1 µm thick) and a sensing film of titanium oxide (1 µm thick). In addition, the resonator uses a support layer of 304 stainless steel (50 µm thick) and two aluminum layers (100 nm thick). Analytical and Finite-Element Method (FEM) models are developed to predict the mechanical behavior of the gas sensor, considering the influence of the different layers of the resonator. The analytical results agree well with respect to the FEM model results. The gas sensor has a first bending frequency of 4722.4 Hz and a sensitivity of 8.22 kHz/g. A minimum detectable concentration of acetaldehyde of 102 ppm can be detected with the proposed sensor. This gas sensor has a linear behavior to detect different acetaldehyde concentrations using the frequency shifts of its multilayer resonator. The gas sensor design offers advantages such as small size, a light weight, and cost-efficient fabrication. Full article
(This article belongs to the Special Issue Novel Devices, Emerging Applications and Advances in MEMS Fabrication Processes, 2nd Edition)
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11 pages, 1245 KiB  
Article
Nonlinear Dynamic Analysis of an Electrostatically Actuated Clamped–Clamped Beam and Excited at the Primary and Secondary Resonances
by Ayman M. Alneamy
Micromachines 2023, 14(10), 1972; https://doi.org/10.3390/mi14101972 - 23 Oct 2023
Cited by 2 | Viewed by 1167
Abstract
This work investigates the primary and secondary resonances of an electrostatically excited double-clamped microbeam and its feasibility to be used for sensing applications. The sensor design can be excited directly in the vicinity of the primary and secondary resonances. This excitation mechanism would [...] Read more.
This work investigates the primary and secondary resonances of an electrostatically excited double-clamped microbeam and its feasibility to be used for sensing applications. The sensor design can be excited directly in the vicinity of the primary and secondary resonances. This excitation mechanism would portray certain nonlinear phenomena and it would certainly lead in increasing the sensitivity of the device. To achieve this, a nonlinear beam model describing transverse deflection based on the Euler–Bernoulli beam theory was utilized. Then, a reduced-order model (ROM) considering all geometric and electrical nonlinearities was derived. Three different techniques involving time domain, fast Fourier transforms (FFTs), and frequency domain (FRCs) were used to examine the appearance of subharmonic resonance of order of one-half under various excitation waveforms. The results show that higher forcing levels and lower damping are required to activate this resonance. We note that as the forcing increases, the size of the instability region grows fast and the size of the unstable region increases rapidly. This, in fact, is an ideal place for designing bifurcation inertia MEMS sensors. Full article
(This article belongs to the Special Issue Novel Devices, Emerging Applications and Advances in MEMS Fabrication Processes, 2nd Edition)
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