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13 pages, 4892 KiB

Open AccessArticle

Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology

by Lukang Wang, You Zhao, Yulong Zhao, Yu Yang, Taobo Gong, Le Hao and Wei Ren

Micromachines 2021, 12(1), 56; https://doi.org/10.3390/mi12010056 - 6 Jan 2021

Cited by 22 | Viewed by 3741

Abstract

Silicon carbide (SiC) has promising potential for pressure sensing in a high temperature and harsh environment due to its outstanding material properties. In this work, a 4H-SiC piezoresistive pressure chip fabricated based on femtosecond laser technology was proposed. A 1030 nm, 200 fs [...] Read more.

Silicon carbide (SiC) has promising potential for pressure sensing in a high temperature and harsh environment due to its outstanding material properties. In this work, a 4H-SiC piezoresistive pressure chip fabricated based on femtosecond laser technology was proposed. A 1030 nm, 200 fs Yb: KGW laser with laser average powers of 1.5, 3 and 5 W was used to drill blind micro holes for achieving circular sensor diaphragms. An accurate per lap feed of 16.2 μm was obtained under laser average power of 1.5 W. After serialized laser processing, the machining depth error of no more than 2% and the surface roughness as low as 153 nm of the blind hole were measured. The homoepitaxial piezoresistors with a doping concentration of 10¹⁹ cm⁻³ were connected by a closed-loop Wheatstone bridge after a rapid thermal annealing process, with a specific contact resistivity of 9.7 × 10⁻⁵ Ω cm². Our research paved the way for the integration of femtosecond laser micromachining and SiC pressure sensor chips manufacturing. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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10 pages, 4744 KiB

Open AccessArticle

Biomimetic Anti-Adhesive Surface Microstructures on Electrosurgical Blade Fabricated by Long-Pulse Laser Inspired by Pangolin Scales

by Chen Li, Yong Yang, Lijun Yang and Zhen Shi

Micromachines 2019, 10(12), 816; https://doi.org/10.3390/mi10120816 - 26 Nov 2019

Cited by 26 | Viewed by 3883

Abstract

The electrosurgical blade is the most common invasive surgical instrument in a cutting and hemostasis process; however, the blade easily leads to the adhesion of overheated soft tissues on the blades and induces a potential danger for the patients. To minimize the adhesive [...] Read more.

The electrosurgical blade is the most common invasive surgical instrument in a cutting and hemostasis process; however, the blade easily leads to the adhesion of overheated soft tissues on the blades and induces a potential danger for the patients. To minimize the adhesive tissues, we proposed the one-step surface texturing method to fabricate anti-adhesive biomimetic scales on stainless steel 316L rapidly based on the self-organized surface microstructures induced by the long-pulse fiber laser, which was inspired by the excellent performances of anti-adhesion and anti-friction in the pangolin scales. The optimal formation parameters, chemical components, and crystal structures of the laser-induced self-organized surface microstructures were investigated in the experiments. Moreover, the underlying formation mechanism was revealed. The electrosurgical blades with biomimetic scales have hydrophobicity and a smaller frictional coefficient, which effectively reduced the adhesion of soft tissue. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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12 pages, 2661 KiB

Open AccessFeature PaperArticle

Effect of Process Parameters and Material Properties on Laser Micromachining of Microchannels

by Matthew Benton, Mohammad Robiul Hossan, Prashanth Reddy Konari and Sanjeewa Gamagedara

Micromachines 2019, 10(2), 123; https://doi.org/10.3390/mi10020123 - 14 Feb 2019

Cited by 44 | Viewed by 4247

Abstract

Laser micromachining has emerged as a promising technique for mass production of microfluidic devices. However, control and optimization of process parameters, and design of substrate materials are still ongoing challenges for the widespread application of laser micromachining. This article reports a systematic study [...] Read more.

Laser micromachining has emerged as a promising technique for mass production of microfluidic devices. However, control and optimization of process parameters, and design of substrate materials are still ongoing challenges for the widespread application of laser micromachining. This article reports a systematic study on the effect of laser system parameters and thermo-physical properties of substrate materials on laser micromachining. Three dimensional transient heat conduction equation with a Gaussian laser heat source was solved using finite element based Multiphysics software COMSOL 5.2a. Large heat convection coefficients were used to consider the rapid phase transition of the material during the laser treatment. The depth of the laser cut was measured by removing material at a pre-set temperature. The grid independent analysis was performed for ensuring the accuracy of the model. The results show that laser power and scanning speed have a strong effect on the channel depth, while the level of focus of the laser beam contributes in determining both the depth and width of the channel. Higher thermal conductivity results deeper in cuts, in contrast the higher specific heat produces shallower channels for a given condition. These findings can help in designing and optimizing process parameters for laser micromachining of microfluidic devices. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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11776 KiB

Open AccessArticle

Investigation of Micro-Bending of Sheet Metal Laminates by Laser-Driven Soft Punch in Warm Conditions

by Huixia Liu, Guoce Zhang, Zongbao Shen, Wenhao Zhang and Xiao Wang

Micromachines 2017, 8(7), 224; https://doi.org/10.3390/mi8070224 - 18 Jul 2017

Cited by 2 | Viewed by 4568

Abstract

Microscale laser dynamic flexible forming (µLDFF) is a novel ultrahigh strain rate manufacturing technology with high efficiency and low cost. However, the µLDFF is just confined to single-layer foil at present. In this work, sheet metal laminates (Cu/Ni) were selected as the experimental [...] Read more.

Microscale laser dynamic flexible forming (µLDFF) is a novel ultrahigh strain rate manufacturing technology with high efficiency and low cost. However, the µLDFF is just confined to single-layer foil at present. In this work, sheet metal laminates (Cu/Ni) were selected as the experimental material for its excellent mechanical and functional properties, and a new micro-bending method of sheet metal laminates by laser-driven soft punch was proposed in warm conditions. The micro-mold and warm platform were designed to investigate the effects of temperature and energy on formability, which were characterized by forming accuracy, surface quality, element diffusion, and so on. The experimental results show that the forming accuracy and quality increased first and then decreased with laser energy, but the hardness increased consistently. In warm conditions, the fluidity of material was improved. The forming depth and accuracy increased for the relieved springback, and the surface quality increased first and then decreased. The tensile fracture disappeared with temperature for the decreased hardness and thinning ratio, and the element diffusion occurred. Overall, this study indicates that the formability can be improved in warm conditions and provides a basis for the investigation of micro-bending of sheet metal laminates by µLDFF in warm conditions. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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2906 KiB

Open AccessFeature PaperArticle

Tuneable Liquid Crystal Micro-Lens Array for Image Contrast Enhancement in a Pixelated Thin Film Photo-Transistor Flat Panel Imager

by Kun Li, Daping Chu, Jiaqi Chu, Shuhei Kitajima, Tokiyoshi Matsuda and Mutsu Kimura

Micromachines 2017, 8(7), 205; https://doi.org/10.3390/mi8070205 - 26 Jun 2017

Cited by 4 | Viewed by 5220

Abstract

We propose and demonstrate the concept of using a tuneable liquid crystal micro-lens (LCML) array to improve the image contrast of a pixelated thin film photo-transistor (TFPT) flat panel imager. Such a device can be used to image contents on paper-based media and [...] Read more.

We propose and demonstrate the concept of using a tuneable liquid crystal micro-lens (LCML) array to improve the image contrast of a pixelated thin film photo-transistor (TFPT) flat panel imager. Such a device can be used to image contents on paper-based media and display a magnified version on a flat panel display for elderly or visually impaired people. Practical aspects including device physical geometry, object scattering profile, LC material, and focusing effect of LCML on an object are considered during the design process with the support of ZEMAX simulations. An optimised effective focal length (EFL) has been calculated for the designed LCML to best relay the objects or contents on a paper to the TFPT pixel plane. The designed LCML devices are fabricated with the optimised EFL, and they have good phase depth profiles which are close to a spherical lens profile. Preliminary test results show that the combination of a TFPT imager with an LCML array can make the image contrast more than two times better than that using the TFPT imager alone. The tuneable EFL of the developed LCMLs are useful in the situation where the LCML is not in direct contact with the imaged object. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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14239 KiB

Open AccessArticle

Fabrication of Micro-Scale Gratings by Nanosecond Laser and Its Applications for Deformation Measurements

by Guanbao Yang, Wei He, Jianguo Zhu and Lei Chen

Micromachines 2017, 8(5), 136; https://doi.org/10.3390/mi8050136 - 25 Apr 2017

Cited by 5 | Viewed by 4889

Abstract

This paper experimentally investigated the fabrication and optimization of micro-scale gratings formed by nanosecond laser etching. The mechanism of nanosecond laser processing and the geometric phase analysis (GPA) are discussed, and the factors influencing the fabrication process including laser energy, laser fluence, and [...] Read more.

This paper experimentally investigated the fabrication and optimization of micro-scale gratings formed by nanosecond laser etching. The mechanism of nanosecond laser processing and the geometric phase analysis (GPA) are discussed, and the factors influencing the fabrication process including laser energy, laser fluence, and ablation threshold of material, are experimentally studied. In order to eliminate the dependence of the processing parameters on the samples, depositing Al film on a sample before laser processing is proposed for the fabrication of high-quality gratings. The energy of the laser pulse is optimized for clear line etching on Al film considering the distance between adjacent lines of parallel gratings. The optimal energy of the laser pulse is 9.8 μJ, and the optimum fluence is 9.5 J/mm² with the waist radius of the laser beam 25.7 μm. With the optimal parameters, experimental results indicate that the highest frequency of parallel gratings is about 30 lines/mm, with a line width of 29 μm, and the distance between two adjacent laser pulses being of 10 μm. By performing tensile tests, micro-scale gratings fabricated on specimens are experimentally verified. The verification tests prove that the proposed fabrication method for the micro-scale gratings in GPA measurements is reliable and applicable, and the micro-scale gratings can be fabricated in many areas of interest, such as the crack tip, for deformation measurements. Furthermore, the adhesion between the Al film and the tested sample is strong enough so that the pattern sticks well to the sample. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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3582 KiB

Open AccessArticle

Visible to Infrared Diamond Photonics Enabled by Focused Femtosecond Laser Pulses

by Belén Sotillo, Vibhav Bharadwaj, John Patrick Hadden, Stefano Rampini, Andrea Chiappini, Toney T. Fernandez, Cristina Armellini, Ali Serpengüzel, Maurizio Ferrari, Paul E. Barclay, Roberta Ramponi and Shane M. Eaton

Micromachines 2017, 8(2), 60; https://doi.org/10.3390/mi8020060 - 17 Feb 2017

Cited by 29 | Viewed by 8106

Abstract

Diamond’s nitrogen-vacancy (NV) centers show great promise in sensing applications and quantum computing due to their long electron spin coherence time and because they can be found, manipulated, and read out optically. An important step forward for diamond photonics would be connecting multiple [...] Read more.

Diamond’s nitrogen-vacancy (NV) centers show great promise in sensing applications and quantum computing due to their long electron spin coherence time and because they can be found, manipulated, and read out optically. An important step forward for diamond photonics would be connecting multiple diamond NVs together using optical waveguides. However, the inertness of diamond is a significant hurdle for the fabrication of integrated optics similar to those that revolutionized silicon photonics. In this work, we show the fabrication of optical waveguides in diamond, enabled by focused femtosecond high repetition rate laser pulses. By optimizing the geometry of the waveguide, we obtain single mode waveguides from the visible to the infrared. Additionally, we show the laser writing of individual NV centers within the bulk of diamond. We use µ-Raman spectroscopy to gain better insight on the stress and the refractive index profile of the optical waveguides. Using optically detected magnetic resonance and confocal photoluminescence characterization, high quality NV properties are observed in waveguides formed in various grades of diamond, making them promising for applications such as magnetometry, quantum information systems, and evanescent field sensors. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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11391 KiB

Open AccessArticle

Effects of Process Conditions on the Mechanical Behavior of Aluminium Wrought Alloy EN AW-2219 (AlCu6Mn) Additively Manufactured by Laser Beam Melting in Powder Bed

by Michael Cornelius Hermann Karg, Bhrigu Ahuja, Sebastian Wiesenmayer, Sergey Vyacheslavovich Kuryntsev and Michael Schmidt

Micromachines 2017, 8(1), 23; https://doi.org/10.3390/mi8010023 - 16 Jan 2017

Cited by 73 | Viewed by 10217

Abstract

Additive manufacturing is especially suitable for complex-shaped 3D parts with integrated and optimized functionality realized by filigree geometries. Such designs benefit from low safety factors in mechanical layout. This demands ductile materials that reduce stress peaks by predictable plastic deformation instead of failure. [...] Read more.

Additive manufacturing is especially suitable for complex-shaped 3D parts with integrated and optimized functionality realized by filigree geometries. Such designs benefit from low safety factors in mechanical layout. This demands ductile materials that reduce stress peaks by predictable plastic deformation instead of failure. Al–Cu wrought alloys are established materials meeting this requirement. Additionally, they provide high specific strengths. As the designation “Wrought Alloys” implies, they are intended for manufacturing by hot or cold working. When cast or welded, they are prone to solidification cracks. Al–Si fillers can alleviate this, but impair ductility. Being closely related to welding, Laser Beam Melting in Powder Bed (LBM) of Al–Cu wrought alloys like EN AW-2219 can be considered challenging. In LBM of aluminium alloys, only easily-weldable Al–Si casting alloys have succeeded commercially today. This article discusses the influences of boundary conditions during LBM of EN AW-2219 on sample porosity and tensile test results, supported by metallographic microsections and fractography. Load direction was varied relative to LBM build-up direction. T6 heat treatment was applied to half of the samples. Pronounced anisotropy was observed. Remarkably, elongation at break of T6 specimens loaded along the build-up direction exceeded the values from literature for conventionally manufactured EN AW-2219 by a factor of two. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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3760 KiB

Open AccessArticle

A Rapid Prototyping Technique for Microfluidics with High Robustness and Flexibility

by Zhenhua Liu, Wenchao Xu, Zining Hou and Zhigang Wu

Micromachines 2016, 7(11), 201; https://doi.org/10.3390/mi7110201 - 8 Nov 2016

Cited by 12 | Viewed by 6922

Abstract

In microfluidic device prototyping, master fabrication by traditional photolithography is expensive and time-consuming, especially when the design requires being repeatedly modified to achieve a satisfactory performance. By introducing a high-performance/cost-ratio laser to the traditional soft lithography, this paper describes a flexible and rapid [...] Read more.

In microfluidic device prototyping, master fabrication by traditional photolithography is expensive and time-consuming, especially when the design requires being repeatedly modified to achieve a satisfactory performance. By introducing a high-performance/cost-ratio laser to the traditional soft lithography, this paper describes a flexible and rapid prototyping technique for microfluidics. An ultraviolet (UV) laser directly writes on the photoresist without a photomask, which is suitable for master fabrication. By eliminating the constraints of fixed patterns in the traditional photomask when the masters are made, this prototyping technique gives designers/researchers the convenience to revise or modify their designs iteratively. A device fabricated by this method is tested for particle separation and demonstrates good properties. This technique provides a flexible and rapid solution to fabricating microfluidic devices for non-professionals at relatively low cost. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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3461 KiB

Open AccessFeature PaperArticle

Flexible Holographic Fabrication of 3D Photonic Crystal Templates with Polarization Control through a 3D Printed Reflective Optical Element

by David Lowell, David George, Jeffrey Lutkenhaus, Chris Tian, Murthada Adewole, Usha Philipose, Hualiang Zhang and Yuankun Lin

Micromachines 2016, 7(7), 128; https://doi.org/10.3390/mi7070128 - 21 Jul 2016

Cited by 12 | Viewed by 7457

Abstract

In this paper, we have systematically studied the holographic fabrication of three-dimensional (3D) structures using a single 3D printed reflective optical element (ROE), taking advantage of the ease of design and 3D printing of the ROE. The reflective surface was setup at non-Brewster [...] Read more.

In this paper, we have systematically studied the holographic fabrication of three-dimensional (3D) structures using a single 3D printed reflective optical element (ROE), taking advantage of the ease of design and 3D printing of the ROE. The reflective surface was setup at non-Brewster angles to reflect both s- and p-polarized beams for the interference. The wide selection of reflective surface materials and interference angles allow control of the ratio of s- and p-polarizations, and intensity ratio of side-beam to central beam for interference lithography. Photonic bandgap simulations have also indicated that both s and p-polarized waves are sometimes needed in the reflected side beams for maximum photonic bandgap size and certain filling fractions of dielectric inside the photonic crystals. The flexibility of single ROE and single exposure based holographic fabrication of 3D structures was demonstrated with reflective surfaces of ROEs at non-Brewster angles, highlighting the capability of the ROE technique of producing umbrella configurations of side beams with arbitrary angles and polarizations and paving the way for the rapid throughput of various photonic crystal templates. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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8772 KiB

Open AccessArticle

Fabrication of Dish-Shaped Micro Parts by Laser Indirect Shocking Compound Process

by Huixia Liu, Chaofei Sha, Zongbao Shen, Liyin Li, Shuai Gao, Cong Li, Xianqing Sun and Xiao Wang

Micromachines 2016, 7(6), 105; https://doi.org/10.3390/mi7060105 - 20 Jun 2016

Cited by 9 | Viewed by 5515

Abstract

Compound process technology has been investigated for many years on a macro scale, but only a few studies can be found on a micro scale due to the difficulties in tool manufacturing, parts transporting and punch-die alignment. In this paper, a novel technology [...] Read more.

Compound process technology has been investigated for many years on a macro scale, but only a few studies can be found on a micro scale due to the difficulties in tool manufacturing, parts transporting and punch-die alignment. In this paper, a novel technology of combining the laser shock wave and soft punch was introduced to fabricate the dish-shaped micro-parts on copper to solve these difficulties. This compound process includes deep drawing, punching and blanking and these processes can be completed almost at the same time because the duration time of laser is quite short, so the precision of the micro-parts can be ensured. A reasonable laser energy of 1550 mJ made the morphology, depth of deformation, dimensional accuracy and surface roughness achieve their best results when the thickness of the soft punches was 200 μm. In addition, thicker soft punches may hinder the compound process due to the action of unloading waves based on the elastic wave theory. So, the greatest thickness of the soft punches was 200 μm. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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4799 KiB

Open AccessArticle

Design and Performance of a Focus-Detection System for Use in Laser Micromachining

by Binh Xuan Cao, Munju Bae, Hyonkee Sohn, Jiyeon Choi, Youngduk Kim, Jeng-o Kim and Jiwhan Noh

Micromachines 2016, 7(1), 2; https://doi.org/10.3390/mi7010002 - 4 Jan 2016

Cited by 20 | Viewed by 7335

Abstract

We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of [...] Read more.

We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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1233 KiB

Open AccessArticle

Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

by Simas Butkus, Aleksandr Alesenkov, Domas Paipulas, Eugenijus Gaižauskas, Andrius Melninkaitis, Dalia Kaškelytė, Martynas Barkauskas and Valdas Sirutkaitis

Micromachines 2015, 6(12), 2010-2022; https://doi.org/10.3390/mi6121471 - 17 Dec 2015

Cited by 8 | Viewed by 7936

Abstract

Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which [...] Read more.

Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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3362 KiB

Open AccessArticle

High Speed Pump-Probe Apparatus for Observation of Transitional Effects in Ultrafast Laser Micromachining Processes

by Ilya Alexeev, Johannes Heberle, Kristian Cvecek, Konstantin Yu. Nagulin and Michael Schmidt

Micromachines 2015, 6(12), 1914-1922; https://doi.org/10.3390/mi6121462 - 7 Dec 2015

Cited by 12 | Viewed by 7186

Abstract

A pump-probe experimental approach has been shown to be a very efficient tool for the observation and analysis of various laser matter interaction effects. In those setups, synchronized laser pulses are used to create an event (pump) and to simultaneously observe it (probe). [...] Read more.

A pump-probe experimental approach has been shown to be a very efficient tool for the observation and analysis of various laser matter interaction effects. In those setups, synchronized laser pulses are used to create an event (pump) and to simultaneously observe it (probe). In general, the physical effects that can be investigated with such an apparatus are restricted by the temporal resolution of the probe pulse and the observation window. The latter can be greatly extended by adjusting the pump-probe time delay under the assumption that the interaction process remains fairly reproducible. Unfortunately, this assumption becomes invalid in the case of high-repetition-rate ultrafast laser material processing, where the irradiation history strongly affects the ongoing interaction process. In this contribution, the authors present an extension of the pump-probe setup that allows to investigate transitional and dynamic effects present during ultrafast laser machining performed at high pulse repetition frequencies. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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4370 KiB

Open AccessArticle

Reduction of Friction of Metals Using Laser-Induced Periodic Surface Nanostructures

by Zhuo Wang, Quanzhong Zhao and Chengwei Wang

Micromachines 2015, 6(11), 1606-1616; https://doi.org/10.3390/mi6111444 - 28 Oct 2015

Cited by 46 | Viewed by 8163

Abstract

We report on the effect of femtosecond-laser-induced periodic surface structures (LIPSS) on the tribological properties of stainless steel. Uniform periodic nanostructures were produced on AISI 304L (American Iron and Steel Institute steel grade) steel surfaces using an 800-nm femtosecond laser. The spatial periods [...] Read more.

We report on the effect of femtosecond-laser-induced periodic surface structures (LIPSS) on the tribological properties of stainless steel. Uniform periodic nanostructures were produced on AISI 304L (American Iron and Steel Institute steel grade) steel surfaces using an 800-nm femtosecond laser. The spatial periods of LIPSS measured by field emission scanning electron microscopy ranged from 530 to 570 nm. The tribological properties of smooth and textured surfaces with periodic nanostructures were investigated using reciprocating ball-on-flat tests against AISI 440C balls under both dry and starved oil lubricated conditions. The friction coefficient of LIPSS covered surfaces has shown a lower value than that of the smooth surface. The induced periodic nanostructures demonstrated marked potential for reducing the friction coefficient compared with the smooth surface. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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11147 KiB

Open AccessArticle

Ultrafast Laser Engraving Method to Fabricate Gravure Plate for Printed Metal-Mesh Touch Panel

by Weiyuan Chen, Wenlang Lai, Yuming Wang, Kaijun Wang, Shengyu Lin, Yuli Yen, Hong Hocheng and Tahsin Chou

Micromachines 2015, 6(10), 1483-1489; https://doi.org/10.3390/mi6101433 - 5 Oct 2015

Cited by 9 | Viewed by 8334

Abstract

In order to engrave gravure plate with fine lines structures, conventional art used lithography with dry/wet etching. Lithography with dry/wet etching method allows to engrave lines with smooth concave shape, but its disadvantages include difficulty in controlling aspect ratio, high and uniform in [...] Read more.

In order to engrave gravure plate with fine lines structures, conventional art used lithography with dry/wet etching. Lithography with dry/wet etching method allows to engrave lines with smooth concave shape, but its disadvantages include difficulty in controlling aspect ratio, high and uniform in large size process, substrate material limitation due to etching solution availability, and process complexity. We developed ultra-fast laser technology to directly engrave a stainless plate, a gravure plate, to be used for fabricating 23 in. metal-mesh touch panel by gravure offset printing process. The technology employs high energy pulse to ablate materials from a substrate. Because the ultra-fast laser pulse duration is shorter than the energy dissipation time between material lattices, there is no heating issue during the ablation process. Therefore, no volcano-type protrusion on the engraved line edges occurs, leading to good printing quality. After laser engraving, we then reduce surface roughness of the gravure plate using electro-polishing process. Diamond like carbon (DLC) coating layer is then added onto the surface to increase scratch resistance. We show that this procedure can fabricate gravure plate for gravure offset printing process with minimum printing linewidth 10.7 μm. A 23 in. metal-mesh pattern was printed using such gravure plate and fully functional touch panel was demonstrated in this work. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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9670 KiB

Open AccessArticle

A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser

by Christos-Edward Athanasiou and Yves Bellouard

Micromachines 2015, 6(9), 1365-1386; https://doi.org/10.3390/mi6091365 - 21 Sep 2015

Cited by 48 | Viewed by 9181 | Correction

Abstract

Mechanical testing of materials at the microscales is challenging. It requires delicate procedures not only for producing and handling the specimen to be tested, but also for applying an accurate and controlled force. This endeavor is even more challenging when it comes to [...] Read more.

Mechanical testing of materials at the microscales is challenging. It requires delicate procedures not only for producing and handling the specimen to be tested, but also for applying an accurate and controlled force. This endeavor is even more challenging when it comes to investigating the behavior of brittle materials such as glass. Here, we present a microtensile tester for investigating silica glass polymorphs. The instrument is entirely made of silica and for which the same femtosecond laser is not only used for fabricating the device, but also for operating it (loading the specimen) as well as for performing in situ measurements. As a proof-of-concept, we present a stress-strain curve of fused silica for unprecedented high tensile stress of 2.4 GPa, as well as preliminary results of the elastic modulus of femtosecond laser-affected zones of fused silica, providing new insights on their microstructures and mechanical behavior. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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6839 KiB

Open AccessArticle

Experimental and Numerical Simulation Research on Micro-Gears Fabrication by Laser Shock Punching Process

by Huixia Liu, Jianwen Li, Zongbao Shen, Qing Qian, Hongfeng Zhang and Xiao Wang

Micromachines 2015, 6(8), 969-983; https://doi.org/10.3390/mi6080969 - 23 Jul 2015

Cited by 16 | Viewed by 7140

Abstract

The aim of this paper is to fabricate micro-gears via laser shock punching with Spitlight 2000 Nd-YAG Laser, and to discuss effects of process parameters namely laser energy, soft punch properties and blank-holder on the quality of micro-gears deeply. Results show that dimensional [...] Read more.

The aim of this paper is to fabricate micro-gears via laser shock punching with Spitlight 2000 Nd-YAG Laser, and to discuss effects of process parameters namely laser energy, soft punch properties and blank-holder on the quality of micro-gears deeply. Results show that dimensional accuracy is the best shocked at 1690 mJ. Tensile fracture instead of shear fracture is the main fracture mode under low laser energy. The soft punch might cause damage to punching quality when too high energy is employed. Appropriate thickness and hardness of soft punch is necessary. Silica gel with 200 µm in thickness is beneficial to not only homogenize energy but also propagate the shock wave. Polyurethane films need more energy than silica gel with the same thickness. In addition, blank-holders with different weight levels are used. A heavier blank-holder is more beneficial to improve the cutting quality. Furthermore, the simulation is conducted to reveal typical stages and the different deformation behavior under high and low pulse energy. The simulation results show that the fracture mode changes under lower energy. Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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1 pages, 187 KiB

Open AccessCorrection

Correction: Athanasiou, C.-E. et al. A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser. Micromachines, 2015, 6, 1365–1386

by Christos-Edward Athanasiou and Yves Bellouard

Micromachines 2018, 9(4), 164; https://doi.org/10.3390/mi9040164 - 2 Apr 2018

Viewed by 2705

Abstract

The authors would like to make the following changes to the published paper [1]: Equation (5) should be written as follows:[...] Full article

(This article belongs to the Special Issue Laser Micromachining and Microfabrication)

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