Nano-Fabrication Technology and Applications
A special issue of Nanomaterials (ISSN 2079-4991). This special issue belongs to the section "Synthesis, Interfaces and Nanostructures".
Deadline for manuscript submissions: closed (21 November 2021) | Viewed by 19333
Special Issue Editor
Interests: nano-imprinting lithography; contact printing lithography; fabrication of seamless roller mold; maskless lithography; grayscaled lithography for 3D microfabrication; excumer laser micromachining of 3D structures
Special Issue Information
Dear Colleagues,
The capabilities of fabricating nanostructures on a variety of materials play a key role in the development and applications of nanoscience and nanotechnologies. Research in nanofabrication has been significantly influenced by the advancement of photolithography in the semiconductor industry for mass production of integrated circuits (ICs) and electronic devices. In the meantime, other types of nanofabrication technologies have also been emerging continuously in recent decades, with different characteristics, emphasis, purposes, and applications. The approach can be either top–down, such as e-beam lithography, focus ion beam, nanoimprinting, laser interference lithography, etc., or bottom–up, for example, molecular self-assembly, sol-gel process, vapor deposition. The issues involved in developing new nanofabrication methods include the underlying physical/chemical principles being used, the tools and materials to facilitate the fabrication process, the capabilities and limitations in nanofabrication, as well as their reliability, stability, and applicability. This Special Issue invites manuscripts concerning innovative nanofabrication technologies with an emphasis on a broad range of applications.
Prof. Dr. Yung-Chun Lee
Guest Editor
Manuscript Submission Information
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Keywords
- Nanofabrication techniques
- Nanolithography
- Nanopatterning
- Nanostructures
- Nanomaterials
- Nanostructured device
- Bottom–up nanofabrication
- Top–down nanofabrication
- Two/three-dimensional (2/3D) nanofabrication
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