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Journal: Sensors, 2012
Volume: 12
Number: 13985
Article:
Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer
Authors:
by
Aldo Ghisi, Stefano Mariani, Alberto Corigliano and Sarah Zerbini
Link:
https://www.mdpi.com/1424-8220/12/10/13985
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