Yan, P.; Lu, Y.; Xiang, C.; Wang, J.; Chen, D.; Chen, J.
A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging. Sensors 2019, 19, 3866.
https://doi.org/10.3390/s19183866
AMA Style
Yan P, Lu Y, Xiang C, Wang J, Chen D, Chen J.
A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging. Sensors. 2019; 19(18):3866.
https://doi.org/10.3390/s19183866
Chicago/Turabian Style
Yan, Pengcheng, Yulan Lu, Chao Xiang, Junbo Wang, Deyong Chen, and Jian Chen.
2019. "A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging" Sensors 19, no. 18: 3866.
https://doi.org/10.3390/s19183866
APA Style
Yan, P., Lu, Y., Xiang, C., Wang, J., Chen, D., & Chen, J.
(2019). A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging. Sensors, 19(18), 3866.
https://doi.org/10.3390/s19183866