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Sensors
Volume 24
Issue 22
10.3390/s24227307
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Journal: Sensors, 2024
Volume: 24
Number: 7307

Article: Data-Driven Analysis of High-Temperature Fluorocarbon Plasma for Semiconductor Processing
Authors: by Sung Kyu Jang, Woosung Lee, Ga In Choi, Jihun Kim, Minji Kang, Seongho Kim, Jong Hyun Choi, Seul-Gi Kim, Seoung-Ki Lee, Hyeong-U Kim and Hyeongkeun Kim
Link: https://www.mdpi.com/1424-8220/24/22/7307

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