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Journal: Micromachines, 2019
Volume: 10
Number: 571
Article:
A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor
Authors:
by
Jian Cui, Haibing Yang, Dong Li, Ziyang Song and Qiancheng Zhao
Link:
https://www.mdpi.com/2072-666X/10/9/571
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