Sandner, T.; Gaumont, E.; Graßhoff, T.; Rieck, A.; Seifert, T.; Auböck, G.; Grahmann, J.
Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers. Micromachines 2020, 11, 883.
https://doi.org/10.3390/mi11100883
AMA Style
Sandner T, Gaumont E, Graßhoff T, Rieck A, Seifert T, Auböck G, Grahmann J.
Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers. Micromachines. 2020; 11(10):883.
https://doi.org/10.3390/mi11100883
Chicago/Turabian Style
Sandner, Thilo, Eric Gaumont, Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Gerald Auböck, and Jan Grahmann.
2020. "Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers" Micromachines 11, no. 10: 883.
https://doi.org/10.3390/mi11100883
APA Style
Sandner, T., Gaumont, E., Graßhoff, T., Rieck, A., Seifert, T., Auböck, G., & Grahmann, J.
(2020). Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers. Micromachines, 11(10), 883.
https://doi.org/10.3390/mi11100883