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Journal: Micromachines, 2020
Volume: 11
Number: 397

Article: Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review
Authors: by Ivo Utke, Johann Michler, Robert Winkler and Harald Plank
Link: https://www.mdpi.com/2072-666X/11/4/397

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