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Censabella M, Drago C, Cafra B, Badalà P, Bassi A, Piccitto G, Mirabella S, Grimaldi MG, Ruffino F. Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si. Micromachines. 2021; 12(8):849. https://doi.org/10.3390/mi12080849

Censabella, Maria, Cristina Drago, Brunella Cafra, Paolo Badalà, Anna Bassi, Giovanni Piccitto, Salvatore Mirabella, Maria Grazia Grimaldi, and Francesco Ruffino. 2021. "Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si" Micromachines 12, no. 8: 849. https://doi.org/10.3390/mi12080849

Censabella, M., Drago, C., Cafra, B., Badalà, P., Bassi, A., Piccitto, G., Mirabella, S., Grimaldi, M. G., & Ruffino, F. (2021). Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si. Micromachines, 12(8), 849. https://doi.org/10.3390/mi12080849