Tsukada, T.; Takigawa, R.; Hasegawa, Y.; Al Farisi, M.S.; Shikida, M.
Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate. Micromachines 2023, 14, 42.
https://doi.org/10.3390/mi14010042
AMA Style
Tsukada T, Takigawa R, Hasegawa Y, Al Farisi MS, Shikida M.
Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate. Micromachines. 2023; 14(1):42.
https://doi.org/10.3390/mi14010042
Chicago/Turabian Style
Tsukada, Tsuyoshi, Ryusei Takigawa, Yoshihiro Hasegawa, Muhammad Salman Al Farisi, and Mitsuhiro Shikida.
2023. "Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate" Micromachines 14, no. 1: 42.
https://doi.org/10.3390/mi14010042
APA Style
Tsukada, T., Takigawa, R., Hasegawa, Y., Al Farisi, M. S., & Shikida, M.
(2023). Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate. Micromachines, 14(1), 42.
https://doi.org/10.3390/mi14010042