Wittek, C.-G.R.; Steinhoff, L.; Raumel, S.; Reißfelder, M.; Dencker, F.; Wurz, M.C.
Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process. Micromachines 2023, 14, 580.
https://doi.org/10.3390/mi14030580
AMA Style
Wittek C-GR, Steinhoff L, Raumel S, Reißfelder M, Dencker F, Wurz MC.
Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process. Micromachines. 2023; 14(3):580.
https://doi.org/10.3390/mi14030580
Chicago/Turabian Style
Wittek, Christian-G. R., Lukas Steinhoff, Selina Raumel, Michael Reißfelder, Folke Dencker, and Marc C. Wurz.
2023. "Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process" Micromachines 14, no. 3: 580.
https://doi.org/10.3390/mi14030580
APA Style
Wittek, C. -G. R., Steinhoff, L., Raumel, S., Reißfelder, M., Dencker, F., & Wurz, M. C.
(2023). Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process. Micromachines, 14(3), 580.
https://doi.org/10.3390/mi14030580