Yu, Z.; Guo, Y.; Fu, S.; Li, B.; Liu, P.; Zhang, S.; Sun, Z.
Partially Etched Piezoelectric Film Filled with SiO2 Structure Applied to A1 Mode Resonators for Transverse Modes Suppression. Micromachines 2023, 14, 1745.
https://doi.org/10.3390/mi14091745
AMA Style
Yu Z, Guo Y, Fu S, Li B, Liu P, Zhang S, Sun Z.
Partially Etched Piezoelectric Film Filled with SiO2 Structure Applied to A1 Mode Resonators for Transverse Modes Suppression. Micromachines. 2023; 14(9):1745.
https://doi.org/10.3390/mi14091745
Chicago/Turabian Style
Yu, Zhenyi, Yu Guo, Sulei Fu, Baichuan Li, Peisen Liu, Shuai Zhang, and Zongqin Sun.
2023. "Partially Etched Piezoelectric Film Filled with SiO2 Structure Applied to A1 Mode Resonators for Transverse Modes Suppression" Micromachines 14, no. 9: 1745.
https://doi.org/10.3390/mi14091745
APA Style
Yu, Z., Guo, Y., Fu, S., Li, B., Liu, P., Zhang, S., & Sun, Z.
(2023). Partially Etched Piezoelectric Film Filled with SiO2 Structure Applied to A1 Mode Resonators for Transverse Modes Suppression. Micromachines, 14(9), 1745.
https://doi.org/10.3390/mi14091745
