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Journal: Micromachines, 2024
Volume: 15
Number: 20
Article:
Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators
Authors:
by
Qian Yang, Tianhang Gao, Chuang Zhu and Lixia Li
Link:
https://www.mdpi.com/2072-666X/15/1/20
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