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Micromachines
Volume 16
Issue 2
10.3390/mi16020166
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This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Article

Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device

by
Minglong Deng
1,
Jinkai Chen
1,*,
Jikai Zhang
2,3,
Weilun Xie
1,
Hao Jin
2,3,*,
Weipeng Xuan
1,
Shurong Dong
2,3 and
Jikui Luo
2,3
1
Ministry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, China
2
College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
3
International Joint Innovation Center, Zhejiang University, Jiaxing 314400, China
*
Authors to whom correspondence should be addressed.
Micromachines 2025, 16(2), 166; https://doi.org/10.3390/mi16020166
Submission received: 9 January 2025 / Revised: 29 January 2025 / Accepted: 29 January 2025 / Published: 30 January 2025
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
Versions Notes

Abstract

La3Ga5SiO14 (langasite, LGS)-based surface acoustic wave (SAW) devices are widely used for industrial health monitoring in harsh high-temperature environments. However, a conventional LGS-based SAW structure has a low quality factor (Q) due to its spurious resonant peaks. A hetero-acoustic layer (HAL)-based structure can effectively enhance the Q factor and the figure of merit (FOM) of SAWs due to its better energy confinement of SAWs. In this work, a HAL-based structure is proposed to achieve a high FOM and high-temperature resistance at the same time. Based on the finite element method (FEM) and coupling-of-model (COM) combined simulation, a systematic numerical investigation was conducted to find the optimal materials and structural parameters considering the viability of an actual fabricating process. After optimizing the layer number, an intermediate-layer material choice and structural parameters, Pt/(0°, 138.5°, 27°) LGS/YX-LGS/SiC HAL structure were chosen. The proposed structure achieves a Q factor and FOM improvement of more than 5 and 2.6 times higher than those of conventional SAW structures, which is important for the development of high temperature SAW sensors. These findings pave a viable method for improving the Q factor and FOM of LGS-based SAW and can provide material and device structural design guidance for fabrication and high-temperature applications in the future.
Keywords: surface acoustic wave; hetero-acoustic layer; harsh environment; numerical analysis; langasite surface acoustic wave; hetero-acoustic layer; harsh environment; numerical analysis; langasite

Share and Cite

MDPI and ACS Style

Deng, M.; Chen, J.; Zhang, J.; Xie, W.; Jin, H.; Xuan, W.; Dong, S.; Luo, J. Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device. Micromachines 2025, 16, 166. https://doi.org/10.3390/mi16020166

AMA Style

Deng M, Chen J, Zhang J, Xie W, Jin H, Xuan W, Dong S, Luo J. Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device. Micromachines. 2025; 16(2):166. https://doi.org/10.3390/mi16020166

Chicago/Turabian Style

Deng, Minglong, Jinkai Chen, Jikai Zhang, Weilun Xie, Hao Jin, Weipeng Xuan, Shurong Dong, and Jikui Luo. 2025. "Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device" Micromachines 16, no. 2: 166. https://doi.org/10.3390/mi16020166

APA Style

Deng, M., Chen, J., Zhang, J., Xie, W., Jin, H., Xuan, W., Dong, S., & Luo, J. (2025). Numerical Design and Optimization of High Performance Langasite and Hetero-Acoustic Layer-Based Surface Acoustic Wave Device. Micromachines, 16(2), 166. https://doi.org/10.3390/mi16020166

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