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Journal: Micromachines, 2017
Volume: 8
Number: 312

Article: Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode
Authors: by Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Yunheub Song and Takahito Ono
Link: https://www.mdpi.com/2072-666X/8/10/312

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