Xu, W.; Yang, J.; Xie, G.; Wang, B.; Qu, M.; Wang, X.; Liu, X.; Tang, B.
Design and Fabrication of a Slanted-Beam MEMS Accelerometer. Micromachines 2017, 8, 77.
https://doi.org/10.3390/mi8030077
AMA Style
Xu W, Yang J, Xie G, Wang B, Qu M, Wang X, Liu X, Tang B.
Design and Fabrication of a Slanted-Beam MEMS Accelerometer. Micromachines. 2017; 8(3):77.
https://doi.org/10.3390/mi8030077
Chicago/Turabian Style
Xu, Wei, Jie Yang, Guofen Xie, Bin Wang, Mingshan Qu, Xuguang Wang, Xianxue Liu, and Bin Tang.
2017. "Design and Fabrication of a Slanted-Beam MEMS Accelerometer" Micromachines 8, no. 3: 77.
https://doi.org/10.3390/mi8030077
APA Style
Xu, W., Yang, J., Xie, G., Wang, B., Qu, M., Wang, X., Liu, X., & Tang, B.
(2017). Design and Fabrication of a Slanted-Beam MEMS Accelerometer. Micromachines, 8(3), 77.
https://doi.org/10.3390/mi8030077