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Journal: Appl. Sci., 2016
Volume: 6
Number: 156
156
Article: A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits
Authors: by So Ito, Hirotaka Kikuchi, Yuanliu Chen, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa and Atsushi Hayashi
Link: https://www.mdpi.com/2076-3417/6/5/156

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