Ermakova, E.; Mogilnikov, K.; Asanov, I.; Fedorenko, A.; Yushina, I.; Kichay, V.; Maksimovskiy, E.; Kosinova, M.
Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor. Coatings 2022, 12, 1767.
https://doi.org/10.3390/coatings12111767
AMA Style
Ermakova E, Mogilnikov K, Asanov I, Fedorenko A, Yushina I, Kichay V, Maksimovskiy E, Kosinova M.
Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor. Coatings. 2022; 12(11):1767.
https://doi.org/10.3390/coatings12111767
Chicago/Turabian Style
Ermakova, Evgeniya, Konstantin Mogilnikov, Igor Asanov, Anastasiya Fedorenko, Irina Yushina, Vadim Kichay, Eugene Maksimovskiy, and Marina Kosinova.
2022. "Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor" Coatings 12, no. 11: 1767.
https://doi.org/10.3390/coatings12111767
APA Style
Ermakova, E., Mogilnikov, K., Asanov, I., Fedorenko, A., Yushina, I., Kichay, V., Maksimovskiy, E., & Kosinova, M.
(2022). Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor. Coatings, 12(11), 1767.
https://doi.org/10.3390/coatings12111767