Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

Round 1

Reviewer 1 Report

Comments and Suggestions for Authors

1. Authors need to provide more details on sample preparation. There were not enough details for others to replicate your work.

2. Suppliers (including counties) and specifications of chemicals must be provided.

3. Countries for equipment manufactured must be provided.

4. The first 3 paragraphs in page 10 must accompanied with references. Any other papers also found the same or similar findings?

5. Can authors provide recommendations for future works/applications at the end of the results section?

Comments on the Quality of English Language

Minor revision is needed.

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Reviewer 2 Report

Comments and Suggestions for Authors

This paper measures the angle-resolved scattering of four silicon samples with different random surface roughness by using three wavelengths and three methods. The AFM measurements are also used for comparisons. Overall, it is of good quality and it makes a good contribution to the field. As far as I am concerned, it can be considered for publication after a major revision with the following concerns are addressed:

(1) A clear statement regarding the novelty and the contribution of this work to the field should be presented in the Abstract/Introduction/Conclusion section.

(2) Lists of symbols and abbreviations should be provided for the reader’s convenience.

(3) In the Results section, appropriate subheadings should be used for clarity.

 

(4) The conclusion section can be more concise by using bullet points.

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Reviewer 3 Report

Comments and Suggestions for Authors

The paper is focused on comparing exact and approximative approaches based on SDT and evaluating the possibility of determining several parameters of roughness heights based on multi-wavelength scattering.

The presentation of the ideas is clear, as well as the discussion and conclusions.

However, some issues require some clarifications:

1. the silicon samples (1 to 4) were individual single wafers, or the experiment was conducted on several wafers for each specific anodic oxidation followed by dissolution in HF acid. for each type of sample noted as 1 to 4. If the used samples were unique, some unexpected results are not surprising.

2. Is any comparative evaluation of the computational effort for the three approaches related to calculations related to ARS(0), ARS(1), and ARS(infinite), to justify the role of the approximations versus the exact formula?

 

Comments on the Quality of English Language

The English language used is appropriate and correct.

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Reviewer 4 Report

Comments and Suggestions for Authors

This work reports on an experimental investigation of the surface roughness of silicon samples based on multiwavelength angle-resolved scattering measurements. The authors perform measurements using three illumination wavelengths on four samples with different roughness and compare the roughness extracted from the scalar diffraction theory to that directly measured using AFM scans.

The paper is overall well-written, the measurements and their analysis are thorough and clearly presented. All in all, I would give a positive recommendation for publication in Coatings.

-Minor point: in their conclusion the authors write that using three wavelengths allows for checking that "the same roughness parameters give correct predictions for the ARS measured at different wavelengths". It could be interesting to compare/comment on the accuracy of the roughness extracted from single and triple wavelength measurements.

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Round 2

Reviewer 2 Report

Comments and Suggestions for Authors

My concerns have been well addressed, and I recommend its publication.