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Journal: Electronics, 2024
Volume: 13
Number: 3577
3577
Article: Improved Plasma Etch Endpoint Detection Using Attention-Based Long Short-Term Memory Machine Learning
Authors: by Ye Jin Kim, Jung Ho Song, Ki Hwan Cho, Jong Hyeon Shin, Jong Sik Kim, Jung Sik Yoon and Sang Jeen Hong
Link: https://www.mdpi.com/2079-9292/13/17/3577

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