Liu, J.; Zhou, J.; Sun, H.; Jin, C.; Wang, J.; Hu, S.
The Inverse Optimization of Lithographic Source and Mask via GA-APSO Hybrid Algorithm. Photonics 2023, 10, 638.
https://doi.org/10.3390/photonics10060638
AMA Style
Liu J, Zhou J, Sun H, Jin C, Wang J, Hu S.
The Inverse Optimization of Lithographic Source and Mask via GA-APSO Hybrid Algorithm. Photonics. 2023; 10(6):638.
https://doi.org/10.3390/photonics10060638
Chicago/Turabian Style
Liu, Junbo, Ji Zhou, Haifeng Sun, Chuan Jin, Jian Wang, and Song Hu.
2023. "The Inverse Optimization of Lithographic Source and Mask via GA-APSO Hybrid Algorithm" Photonics 10, no. 6: 638.
https://doi.org/10.3390/photonics10060638
APA Style
Liu, J., Zhou, J., Sun, H., Jin, C., Wang, J., & Hu, S.
(2023). The Inverse Optimization of Lithographic Source and Mask via GA-APSO Hybrid Algorithm. Photonics, 10(6), 638.
https://doi.org/10.3390/photonics10060638