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Journal: Photonics, 2024
Volume: 11
Number: 75

Article: Research on High-Precision Position Detection Based on a Driven Laser Spot in an Extreme Ultraviolet Light Source
Authors: by Rui Bao, Deyang Yu, Fei Chen, Zhe Lv, Jun Xue, Qikun Pan and Ranran Zhang
Link: https://www.mdpi.com/2304-6732/11/1/75

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