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Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range
 
 
Proceeding Paper

Article Versions Notes

Proceedings 2017, 1(4), 283; https://doi.org/10.3390/proceedings1040283
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article pdf uploaded. 28 August 2017 17:21 CEST Version of Record https://www.mdpi.com/2504-3900/1/4/283/pdf-vor
article pdf uploaded. 11 October 2017 09:58 CEST Updated version of record https://www.mdpi.com/2504-3900/1/4/283/pdf
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