Soldera, M.; Teutoburg-Weiss, S.; Schröder, N.; Voisiat, B.; Lasagni, A.F.
Compact Optical System Based on Scatterometry for Off-Line and Real-Time Monitoring of Surface Micropatterning Processes. Optics 2023, 4, 198-213.
https://doi.org/10.3390/opt4010014
AMA Style
Soldera M, Teutoburg-Weiss S, Schröder N, Voisiat B, Lasagni AF.
Compact Optical System Based on Scatterometry for Off-Line and Real-Time Monitoring of Surface Micropatterning Processes. Optics. 2023; 4(1):198-213.
https://doi.org/10.3390/opt4010014
Chicago/Turabian Style
Soldera, Marcos, Sascha Teutoburg-Weiss, Nikolai Schröder, Bogdan Voisiat, and Andrés Fabián Lasagni.
2023. "Compact Optical System Based on Scatterometry for Off-Line and Real-Time Monitoring of Surface Micropatterning Processes" Optics 4, no. 1: 198-213.
https://doi.org/10.3390/opt4010014
APA Style
Soldera, M., Teutoburg-Weiss, S., Schröder, N., Voisiat, B., & Lasagni, A. F.
(2023). Compact Optical System Based on Scatterometry for Off-Line and Real-Time Monitoring of Surface Micropatterning Processes. Optics, 4(1), 198-213.
https://doi.org/10.3390/opt4010014