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Journal: Sensors, 2018
Volume: 18
Number: 1240

Article: Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application
Authors: by Zhibo Ma, Yinan Wang, Qiang Shen, Han Zhang and Xuetao Guo
Link: https://www.mdpi.com/1424-8220/18/4/1240

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