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Journal: Sensors, 2018
Volume: 18
Number: 2055
Article:
High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors
Authors:
by
Yi-Jia Du, Ting-Ting Yang, Dong-Dong Gong, Yi-Cheng Wang, Xiang-Yu Sun, Feng Qin and Gang Dai
Link:
https://www.mdpi.com/1424-8220/18/7/2055
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