Song, X.; Liu, H.; Fang, Y.; Zhao, C.; Qu, Z.; Wang, Q.; Tu, L.-C.
An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. Sensors 2020, 20, 3652.
https://doi.org/10.3390/s20133652
AMA Style
Song X, Liu H, Fang Y, Zhao C, Qu Z, Wang Q, Tu L-C.
An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. Sensors. 2020; 20(13):3652.
https://doi.org/10.3390/s20133652
Chicago/Turabian Style
Song, Xiaoxiao, Huafeng Liu, Yanyan Fang, Chun Zhao, Ziqiang Qu, Qiu Wang, and Liang-Cheng Tu.
2020. "An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer" Sensors 20, no. 13: 3652.
https://doi.org/10.3390/s20133652
APA Style
Song, X., Liu, H., Fang, Y., Zhao, C., Qu, Z., Wang, Q., & Tu, L. -C.
(2020). An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. Sensors, 20(13), 3652.
https://doi.org/10.3390/s20133652