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Journal: Sensors, 2023
Volume: 23
Number: 4665

Article: Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles
Authors: by Avik Ghosh Dastidar, Reshmi Maity, Ramesh Chandra Tiwari, Dejan Vidojevic, Tijana S. Kevkic, Vojkan Nikolic, Subhajit Das and Niladri Pratap Maity
Link: https://www.mdpi.com/1424-8220/23/10/4665

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