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Journal: Micromachines, 2021
Volume: 12
Number: 1367

Article: Surface Patterning of Closed Nanochannel Using VUV Light and Surface Evaluation by Streaming Current
Authors: by Kyojiro Morikawa, Haruki Kazumi, Yoshiyuki Tsuyama, Ryoichi Ohta and Takehiko Kitamori
Link: https://www.mdpi.com/2072-666X/12/11/1367

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