Barth, S.; Schreiber, T.; Cornelius, S.; Zywitzki, O.; Modes, T.; Bartzsch, H.
High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area. Micromachines 2022, 13, 1561.
https://doi.org/10.3390/mi13101561
AMA Style
Barth S, Schreiber T, Cornelius S, Zywitzki O, Modes T, Bartzsch H.
High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area. Micromachines. 2022; 13(10):1561.
https://doi.org/10.3390/mi13101561
Chicago/Turabian Style
Barth, Stephan, Tom Schreiber, Steffen Cornelius, Olaf Zywitzki, Thomas Modes, and Hagen Bartzsch.
2022. "High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area" Micromachines 13, no. 10: 1561.
https://doi.org/10.3390/mi13101561
APA Style
Barth, S., Schreiber, T., Cornelius, S., Zywitzki, O., Modes, T., & Bartzsch, H.
(2022). High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area. Micromachines, 13(10), 1561.
https://doi.org/10.3390/mi13101561