Li, J.; Liu, J.; Peng, C.; Liu, X.; Wu, Z.; Zheng, F.
Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect. Micromachines 2022, 13, 619.
https://doi.org/10.3390/mi13040619
AMA Style
Li J, Liu J, Peng C, Liu X, Wu Z, Zheng F.
Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect. Micromachines. 2022; 13(4):619.
https://doi.org/10.3390/mi13040619
Chicago/Turabian Style
Li, Jiachen, Jun Liu, Chunrong Peng, Xiangming Liu, Zhengwei Wu, and Fengjie Zheng.
2022. "Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect" Micromachines 13, no. 4: 619.
https://doi.org/10.3390/mi13040619
APA Style
Li, J., Liu, J., Peng, C., Liu, X., Wu, Z., & Zheng, F.
(2022). Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect. Micromachines, 13(4), 619.
https://doi.org/10.3390/mi13040619