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Journal: Micromachines, 2022
Volume: 13
Number: 759

Article: Integrated Piezoresistive Normal Force Sensors Fabricated Using Transfer Processes with Stiction Effect Temporary Handling
Authors: by Ni Liu, Peng Zhong, Chaoyue Zheng, Ke Sun, Yifei Zhong and Heng Yang
Link: https://www.mdpi.com/2072-666X/13/5/759

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