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Journal: Micromachines, 2023
Volume: 14
Number: 84
84
Article: An On-Chip Microscale Vacuum Chamber with High Sealing Performance Using Graphene as Lateral Feedthrough
Authors: by Panpan Yu, Fangyuan Zhan, Weidong Rao, Yanqing Zhao, Zheng Fang, Zidong Tu, Zhiwei Li, Dengzhu Guo and Xianlong Wei
Link: https://www.mdpi.com/2072-666X/14/1/84

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