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Journal: Micromachines, 2023
Volume: 14
Number: 2212

Article: A Novel SiC Trench MOSFET with Self-Aligned N-Type Ion Implantation Technique
Authors: by Baozhu Wang, Hongyi Xu, Na Ren, Hengyu Wang, Kai Huang and Kuang Sheng
Link: https://www.mdpi.com/2072-666X/14/12/2212

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