Liu, H.; Fang, R.; Miao, M.; Zhang, Y.; Yan, Y.; Tang, X.; Lu, H.; Jin, Y.
Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers. Micromachines 2018, 9, 120.
https://doi.org/10.3390/mi9030120
AMA Style
Liu H, Fang R, Miao M, Zhang Y, Yan Y, Tang X, Lu H, Jin Y.
Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers. Micromachines. 2018; 9(3):120.
https://doi.org/10.3390/mi9030120
Chicago/Turabian Style
Liu, Huan, Runiu Fang, Min Miao, Yichuan Zhang, Yingzhan Yan, Xiaoping Tang, Huixiang Lu, and Yufeng Jin.
2018. "Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers" Micromachines 9, no. 3: 120.
https://doi.org/10.3390/mi9030120
APA Style
Liu, H., Fang, R., Miao, M., Zhang, Y., Yan, Y., Tang, X., Lu, H., & Jin, Y.
(2018). Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers. Micromachines, 9(3), 120.
https://doi.org/10.3390/mi9030120