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Journal: Crystals, 2022
Volume: 12
Number: 101
Article:
A Review on Precision Polishing Technology of Single-Crystal SiC
Authors:
by
Gaoling Ma, Shujuan Li, Feilong Liu, Chen Zhang, Zhen Jia and Xincheng Yin
Link:
https://www.mdpi.com/2073-4352/12/1/101
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