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Journal: Crystals, 2024
Volume: 14
Number: 371
Article:
Study of AlN Epitaxial Growth on Si (111) Substrate Using Pulsed Metal–Organic Chemical Vapour Deposition
Authors:
by
Muhammad Iznul Hisyam, Ahmad Shuhaimi, Rizuan Norhaniza, Marwan Mansor, Adam Williams and Mohd Rofei Mat Hussin
Link:
https://www.mdpi.com/2073-4352/14/4/371
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