A Flexible 7-in-1 Microsensor Embedded in a Hydrogen/Vanadium Redox Battery for Real-Time Microscopic Measurements
Abstract
:1. Introduction
2. Development of the Flexible 7-in-1 Microsensor
- (a)
- First of all, the PI film was cleaned with acetone and methanol organic solutions, respectively, and the residual methanol was removed by DI water. The surface dust and residual oil and fat were removed to enhance the adhesive ability of the thin film metal.
- (b)
- AZP4620 was coated, and the electrode patterns of micro hydrogen, electrical conductivity, temperature, pressure lower electrode, voltage, current, and flow sensors were defined by using photolithography.
- (c)
- Cr and Au were evaporated by an E-beam evaporator as the adhesion layer and sensing electrode layer.
- (d)
- LTC 9320 was coated as the protection layer after lift-off using acetone. The sensing areas and pins of micro voltage, current, and hydrogen sensors were defined by using the photolithography process so that they were exposed and not covered by the protection layer.
- (e)
- LTC 9305 was coated as a dielectric layer after the protection layer, and the sensing areas of micro-pressure were defined by using the photolithography process.
- (f)
- AZP 4620 was coated, and the upper electrode pattern of the micro pressure sensor was defined by using the photolithography process. Acetone was used for lift-off.
- (g)
- AZP4620 was coated, and the micro hydrogen sensor pattern was defined. The tin dioxide and Pt were evaporated on the micro hydrogen sensor, and acetone was used for lift-off. The production of a flexible 7-in-1 microsensor was completed. Figure 2 shows the optical micrograph of the flexible 7-in-1 microsensor.
3. Calibrations of the Flexible 7-in-1 Microsensor
3.1. Temperature Calibration of Flexible 7-in-1 Microsensor
3.2. Pressure Calibration of the Flexible 7-in-1 Microsensor
3.3. Flow Calibration of the Flexible 7-in-1 Microsensor
3.4. Voltage, Current, and Electrical Conductivity Calibration of Flexible 7-in-1 Microsensor
3.5. Hydrogen Calibration of Flexible 7-in-1 Microsensor
4. Development of Hydrogen/Vanadium Redox Battery
4.1. Hydrogen/Vanadium Redox Battery Design
4.2. Metal Collector Plate, End Plate, and Flow-Field Plate
5. Flexible 7-in-1 Microsensor Embedded in Hydrogen/Vanadium Redox Battery
5.1. Internal Voltage Measurement during Charging of Hydrogen/Vanadium Redox Battery
5.2. Internal Current Measurement during Charging of Hydrogen/Vanadium Redox Battery
5.3. Internal Electrical Conductivity Measurement during Charging of Hydrogen/Vanadium Redox Battery
5.4. Internal Temperature Measurement during Charging of Hydrogen/Vanadium Redox Battery
5.5. Internal Flow Measurement of Hydrogen/Vanadium Redox Battery
5.6. Internal Pressure Measurement of Hydrogen/Vanadium Redox Battery
5.7. Internal Hydrogen Measurement of Hydrogen/Vanadium Redox Battery
6. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Lee, C.-Y.; Chen, C.-H.; Chen, Y.-C.; Jiang, X.-F. A Flexible 7-in-1 Microsensor Embedded in a Hydrogen/Vanadium Redox Battery for Real-Time Microscopic Measurements. Membranes 2023, 13, 49. https://doi.org/10.3390/membranes13010049
Lee C-Y, Chen C-H, Chen Y-C, Jiang X-F. A Flexible 7-in-1 Microsensor Embedded in a Hydrogen/Vanadium Redox Battery for Real-Time Microscopic Measurements. Membranes. 2023; 13(1):49. https://doi.org/10.3390/membranes13010049
Chicago/Turabian StyleLee, Chi-Yuan, Chia-Hung Chen, Yu-Chun Chen, and Xin-Fu Jiang. 2023. "A Flexible 7-in-1 Microsensor Embedded in a Hydrogen/Vanadium Redox Battery for Real-Time Microscopic Measurements" Membranes 13, no. 1: 49. https://doi.org/10.3390/membranes13010049
APA StyleLee, C. -Y., Chen, C. -H., Chen, Y. -C., & Jiang, X. -F. (2023). A Flexible 7-in-1 Microsensor Embedded in a Hydrogen/Vanadium Redox Battery for Real-Time Microscopic Measurements. Membranes, 13(1), 49. https://doi.org/10.3390/membranes13010049