Article Versions Notes

Wi SJ, Kim WJ, Kim H, Jeong D, Lee DG, Choi J, Cho SJ, Yu L, Ahn J. Study on ZrSi₂ as a Candidate Material for Extreme Ultraviolet Pellicles. Membranes. 2023; 13(8):731. https://doi.org/10.3390/membranes13080731

Wi, Seong Ju, Won Jin Kim, Haneul Kim, Dongmin Jeong, Dong Gi Lee, Jaehyuck Choi, Sang Jin Cho, Lan Yu, and Jinho Ahn. 2023. "Study on ZrSi₂ as a Candidate Material for Extreme Ultraviolet Pellicles" Membranes 13, no. 8: 731. https://doi.org/10.3390/membranes13080731

Wi, S. J., Kim, W. J., Kim, H., Jeong, D., Lee, D. G., Choi, J., Cho, S. J., Yu, L., & Ahn, J. (2023). Study on ZrSi₂ as a Candidate Material for Extreme Ultraviolet Pellicles. Membranes, 13(8), 731. https://doi.org/10.3390/membranes13080731